Modeling of dielectric charging in RF MEMS capacitive switches

Sumant, Prasad S.; Cangellaris, A.C.; Aluru, N. R.

doi:10.1002/mop.22903

Cited by 21 publications

(15 citation statements)

References 12 publications

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“…This charge injection process is very similar with that of charge accumulation in the regions with discontinuous electrical parameter. Thus, the charge injection process can be described by the analysis of multilayer Maxwell capacitor configuration, and the transient growth of charge injection process can be expressed as [20] …”

Section: Resultsmentioning

confidence: 99%

“…3) Total Capacitance: Combining (5)- (7) and (17)- (20), the relationship between the contact ratio and the voltage stress is shown in Fig. 8(a).…”

Section: ) Capacitance In Contact Areamentioning

confidence: 98%

“…The capacitance variation ΔC is first converted to the stressed voltage variation ΔV using C-V relationship established in this paper. The upstate C-V relationship is obtained by (1)-(3), and the downstate C-V relationship is obtained by (4)- (20). These equations are too complex to get analytical solutions, so the calculation work is done by Matlab software.…”

Section: ) Capacitance In Contact Areamentioning

confidence: 99%

See 2 more Smart Citations

Effect of Environmental Humidity on Dielectric Charging Effect in RF MEMS Capacitive Switches Based on $C$– $V$ Properties

Wang

Tang

Huang

2013

J. Microelectromech. Syst.

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A capacitance-voltage (C-V ) model is developed for RF microelectromechanical systems (MEMS) switches at upstate and downstate. The transient capacitance response of the RF MEMS switches at different switch states was measured for different humidity levels. By using the C-V model as well as the voltage shift dependent of trapped charges, the transient trapped charges at different switch states and humidity levels are obtained. Charging models at different switch states are explored in detail. It is shown that the injected charges increase linearly with humidity levels and the internal polarization increases with increasing humidity at downstate. The speed of charge injection at 80% relative humidity (RH) is about ten times faster than that at 20% RH. A measurement of pull-in voltage shifts by C-V sweep cycles at 20% and 80% RH gives a reasonable evidence. The present model is useful to understand the pull-in voltage shift of the RF MEMS switch. [2012-0144]Index Terms-Capacitance characterization, dielectric charging, humidity, RF microelectromechanical systems (MEMS) capacitive switch, Si 3 N 4 film.

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Section: Resultsmentioning

confidence: 99%

“…3) Total Capacitance: Combining (5)- (7) and (17)- (20), the relationship between the contact ratio and the voltage stress is shown in Fig. 8(a).…”

Section: ) Capacitance In Contact Areamentioning

confidence: 98%

Section: ) Capacitance In Contact Areamentioning

confidence: 99%

See 1 more Smart Citation

Effect of Environmental Humidity on Dielectric Charging Effect in RF MEMS Capacitive Switches Based on $C$– $V$ Properties

Wang

Tang

Huang

2013

J. Microelectromech. Syst.

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“…The surface roughness of the metal bridge and dielectric film affect directly the dielectric charging since charges are injected through the contacting areas. The effect of dielectric charging through surface roughness and asperities has been reported in several papers (Cabuz 1999, van Spengen 2002, Sumant 2007, Papaioannou 2007d. Moreover charges are injected through micro gap discharge (Torres 1999, Slade 2002, Hourdakis 2006 in the proximity areas due to deviation from Pasken law and the charging is induced due to high electric field (Papaioannou 2006b) in areas where no one of the previous mechanisms can occur.…”

Section: Effect Of Contact Roughnessmentioning

confidence: 91%

Physics of Charging in Dielectrics and Reliability of Capacitive RF-MEMS Switches

Papaioannou¹,

Plana²

2010

Advanced Microwave and Millimeter Wave Technologies Semiconductor Devices Circuits and Systems

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“…For devices that demand structures with relatively stiffer mechanical parts, this creates a problem because it becomes increasingly difficult to obtain the same displacement using voltages that lie within the CMOS operating regime. Moreover, the use of large voltages reduces device lifetime due to unwanted side-effects like dielectric charging [5].…”

Section: Motivationmentioning

confidence: 99%

Analysis of Hybrid Electrothermomechanical Microactuators With Integrated Electrothermal and Electrostatic Actuation

Alwan

Aluru

2009

J. Microelectromech. Syst.

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The goal of this research is to integrate electrothermal and electrostatic actuation in microelectromechanical systems (MEMS). We look at cases where these two types of actuation are intimately coupled and argue that such integrated electrothermomechanical microactuators have more advantages than pure electrothermal or electrostatic devices. We further propose a framework to model hybrid electrothermomechanical actuation to get a consistent solution for the coupled mechanical, thermal and electrical fields in the steady-state.Employing a Lagrangian approach, the inhomogeneous current conduction equation is used to describe the electric potential, while the thermal and displacement fields are obtained by solving the nonlinear heat conduction equation and by performing a large deformation mechanical analysis, respectively. To preserve numerical accuracy and reduce computational time, we also incorporate a boundary integral formulation to describe the electric potential in the medium surrounding the actuator. We show through the example of a hybrid double-beam actuator, that electrothermomechanical actuation results in low voltage, low power operation that could be used for switching applications in MEMS. We also extend the same device towards bidirectional actuation and demonstrate how it may be used to overcome common problems like stiction that occur in MEMS switches.ii

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Modeling of dielectric charging in RF MEMS capacitive switches

Abstract: : A unified, macroscopic, one-dimensional

Cited by 21 publications

References 12 publications

Effect of Environmental Humidity on Dielectric Charging Effect in RF MEMS Capacitive Switches Based on $C$– $V$ Properties

Effect of Environmental Humidity on Dielectric Charging Effect in RF MEMS Capacitive Switches Based on $C$– $V$ Properties

Physics of Charging in Dielectrics and Reliability of Capacitive RF-MEMS Switches

Analysis of Hybrid Electrothermomechanical Microactuators With Integrated Electrothermal and Electrostatic Actuation

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