Modeling, identification and control of a metrological Atomic Force Microscope with a 3DOF stage

Merry, Rje Roel; Uyanik, Mustafa; Koops, Richard; Molengraft, René van de; Veghel, Marijn van; Steinbuch, M Maarten

doi:10.1109/acc.2008.4586903

Cited by 4 publications

(2 citation statements)

References 15 publications

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“…Since the piezo‐stack actuators act as position actuators, a position feedforward can be used to improve the performance of the stage 28. The control input of the position feedforward can be added to the output of the feedback controllers V i , i ∈{ x, y }, resulting in a new input to the system V

_{italici}^{*}

as where r is the reference signal and K the feedforward gain.…”

Section: Resultsmentioning

confidence: 99%

Identification, control and hysteresis compensation of a 3 DOF metrological AFM

Merry

Uyanik

Molengraft

et al. 2009

Asian Journal of Control

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Atomic Force Microscopes (AFMs) are widely used for the investigation of samples at the nanometer scale. The metrological AFM used in this work uses a 3 degrees-of-freedom (DOFs) stage, driven by piezo-stack actuators, for sample manipulation in combination with a fixed cantilever. The piezostack actuators suffer from hysteresis, which acts as a nonlinear disturbance on the system and/or can change the system dynamics. The contributions of this paper are the application of feedback control to all 3 DOFs of the metrological AFM and the design and application of a hysteresis feedforward for the asymmetric hysteresis present in the system. The amount of coupling between the DOFs is assessed by a non-parametric multiple-input-multipleoutput (MIMO) identification. Since the dynamics appear to be decoupled in the frequency range of interest, feedback controllers are designed for each DOF separately. For the modeling of the asymmetric hysteresis an extended Coleman-Hodgdon model is proposed. This model is used for feedforward compensation of the hysteresis. The combination of feedback control for all DOFs and the asymmetric hysteresis feedforward enables the AFM to track scanning profiles within the sensor bound of 5 nm. Real-time imaging of the sample is possible with an accuracy of 2 nm.

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_{italici}^{*}

as where r is the reference signal and K the feedforward gain.…”

Section: Resultsmentioning

confidence: 99%

Identification, control and hysteresis compensation of a 3 DOF metrological AFM

Merry

Uyanik

Molengraft

et al. 2009

Asian Journal of Control

Self Cite

View full text Add to dashboard Cite

show abstract

“…In contrast to commercial AFMs, the accuracy of the measurements is much more important than the scanning speed. However, it is desirable to increase the speed with respect to the current design [1].…”

Section: Introductionmentioning

confidence: 99%