Directional Repetitive Control of a Metrological AFM

Merry, Rje Roel; Ronde, Mjc Michael; Molengraft, René van de; Koops, K. R.; Steinbuch, M Maarten

doi:10.1109/tcst.2010.2091642

Cited by 11 publications

(7 citation statements)

References 26 publications

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“…[203][204][205] Recently, a feedback-based approach known as repetitive control (RC) was exploited for tracking periodic trajectories in nanopositioning applications including high-speed and metrological AFMs. 20,206,207 The RC provides high gain at the harmonics of the reference trajectory by incorporating a signal generator within the feedback loop. 208,209 For piezobased nanopositioning systems, the RC can be designed for low tracking error in the presence of dynamic and hysteresis effects.…”

Section: B Techniques For High-speed Nanopositioningmentioning

confidence: 99%

Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

Yong

Moheimani

Kenton

et al. 2012

Review of Scientific Instruments

403

210

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Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development of high-bandwidth flexure-guided nanopositioning systems (nanopositioners). Such nanopositioners are designed to move samples with sub-nanometer resolution with positioning bandwidth in the kilohertz range. State-of-the-art designs incorporate uniquely designed flexure mechanisms driven by compact and stiff piezoelectric actuators. This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning. Future challenges and research topics are also discussed.

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Section: B Techniques For High-speed Nanopositioningmentioning

confidence: 99%

Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

Yong

Moheimani

Kenton

et al. 2012

Review of Scientific Instruments

403

210

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show abstract

“…Although existing work on robust RC has dealt with both uncertainties in the signal period [30,17,31,32] and the plant [7,33,34,35], such works are not immediately applicable since this work considers a known reference period, and the chosen structure of the overall control scheme and type of uncertainty differs from what has been previously studied. A tuning method to ensure robust stability for the RC scheme is therefore proposed.…”

Section: Outlinementioning

confidence: 99%

Low-order continuous-time robust repetitive control: Application in nanopositioning

2015

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A low-order repetitive control (RC) design in continuous-time for nanopositioning applications is presented. It focuses on achieving high performance and sufficient robustness to uncertainties. The design is mainly applicable to analog implementation, but due to the exceptionally low order, it also results in a fast and efficient digital implementation. Experimental results for an analog implementation using a bucket brigade device (BBD), as well as a digital implementation, is presented. RC can provide fast and accurate tracking of periodic reference signals, which is useful in many scanning probe microscopy and nanofabrication applications.

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“…Periodic reference trajectories occur in both imaging and manipulation applications of SPM equipment. Recently, repetitive control (RC) has been introduced for nanopositioning systems (Aridogan et al, 2009;Merry et al, 2011;Shan and Leang, 2012b). The RC scheme is based on the internal model principle (Francis and Wonham, 1976) and it is specifically tailored to track periodic reference trajectories.…”

Section: Introductionmentioning

confidence: 99%

Analog Robust Repetitive Control for Nanopositioning Using Bucket Brigade Devices

Eielsen

Gravdahl

Leang

2014

IFAC Proceedings Volumes

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In many applications of nanopositioning, such as scanning probe microscopy, tracking fast periodic reference trajectories with high accuracy is highly desirable. Repetitive control is a simple and effective control scheme to obtain good tracking of such reference trajectories. In order to implement repetitive control, a method for introducing time-delay is necessary. This can easily be implemented using a memory buffer with digital signal processing equipment. To achieve fast, high accuracy, and low noise performance, fast microcontrollers or field-programmable gate array hardware with fast highresolution analog-to-digital and digital-to-analog converters are needed. As an inexpensive alternative to digital signal processing, the use of an analog bucket brigade device to implement the time-delay is investigated in this paper. Bucket brigade devices use switching to carry the input voltage over an array of capacitors, achieving a specified time-delay. Low-noise bucket brigade devices can achieve a signal-to-noise ratio around 80 dB, comparable to the actual performance when using 16-bit analog-todigital converters. In this paper, the proposed control scheme utilizes a modified integral control law in conjunction with the repetitive control law. The overall control scheme ensures robustness towards plant uncertainty. Experimental results demonstrate the effectiveness of the overall control scheme and the analog implementation.

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Directional Repetitive Control of a Metrological AFM

Cited by 11 publications

References 26 publications

Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

Low-order continuous-time robust repetitive control: Application in nanopositioning

Analog Robust Repetitive Control for Nanopositioning Using Bucket Brigade Devices

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