Modeling, Fabrication, and Testing of a Piezoelectric MEMS Vibrational Energy Reclamation Device

Abstract

Sensors and Electron Devices Directorate, ARLApproved for public release; distribution unlimited. Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing the collection information. Send comments regarding this burden estimate or any other aspect of this collection of information, including suggestions for reducing the burden, to Department of Defense, Washington Headquarters Services, Directorate for Information Operations and Reports (0704-0188), 1215 Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302. Respondents should be aware that notwithstanding any other provision of law, no person shall be subject to any penalty for failing to comply with a collection of information if it does not display a currently valid OMB control number. ii REPORT DOCUMENTATION PAGE

Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes

“…where avg is the average Young's modulus of the beam's materials, , , and are the width, thickness, and length of each beam, and avg of the composite layers can be calculated using [30]…”

Design, modeling and simulation of CMOS-MEMS resonator for biomedical application

“…where; E avg is the average Young's modulus of the CMOS layers used and w, t, and l are width, thickness and length of the beam, respectively. E avg of a composite structure with n number of layers with a total thickness t can be calculated using (7) [15].…”

“…The concentration sensitivity (Hz/g/m 3 ) in (15) is converted to concentration sensitivity (Hz/ppm) by using (16) [6]. (16) where W is the molecular weight of the analyte in g/mol, P is the partial pressure (in Pascal) of the analyte at the given temperature (in Kelvin) T, and R is the ideal gas constant and it is 8.3145 J.mol -1 K -1 .…”