Modeling and simulation of STacked Gate Oxide (STGO) architecture in Silicon-On-Nothing (SON) MOSFET

Kasturi, Poonam; Saxena, Manoj; Gupta, R. S.

doi:10.1016/j.sse.2005.07.004

Cited by 12 publications

(1 citation statement)

References 16 publications

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“…High-k dielectric has numerous advantages [31][32][33], but direct deposition of HfO 2 over a silicon substrate is complex due to stability issues and can also degrade the performance of the biosensor. Therefore, HfO 2 is deposited over a thin layer of SiO 2 [34,35]. The literature survey reveals that channel doping [36,37] and source doping [38,39] must be kept low and high, respectively, to obtain superior characteristics.…”

Section: Introductionmentioning

confidence: 99%

Physics based numerical model of a nanoscale dielectric modulated step graded germanium source biotube FET sensor: modelling and simulation

Das,

Rewari,

Kanaujia

et al. 2023

Phys. Scr.

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This paper proposes a novel dielectric modulated step-graded germanium source biotube FET for label-free biosensing applications. Its integrated structure and unique design combine the benefits of the gate stack, germanium source, triple-gate architecture, and a step-graded biotube channel, resulting in superior performance over existing biosensors. A compact two-dimensional analytical model for channel potential, drain current, threshold voltage, and subthreshold swing has been formulated and agrees well with the simulated results. The comprehensive investigation of different device parameters, including doping and bias, offers valuable insights into optimizing the biosensor’s performance. The proposed biosensor exhibits remarkable sensitivity, achieving up to 263 mV and 1495.52 nA for certain biomolecules, which has been validated by a compact analytical model and simulations performed on the SILVACO TCAD simulator. Several parameters are employed to assess the biosensor’s effectiveness: threshold voltage, ION/IOFF ratio, subthreshold swing, off-current, peak trans-conductance, and on-current. Furthermore, the biotube channel design enables lightweight and cost-efficient biosensors, enhancing the biosensor’s practicality. This work also includes an analysis of the effect of temperature on the biosensor’s performance and characteristics, providing insights into practical applications. High sensitivity of the biosensor signifies a significant advancement in biosensing technology, suggesting a wide range of potential applications in biomedical field.

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