Abstract:To meet the needs of the continual scaling of wiring structures, 3D IC integration with through-silicon-vias has become the most important direction to go for further miniaturization. Compared to the conventional packaging, 3D integration based on the TSV technology has several inherent advantages, such as small size, high density and short interconnect path. Consequently, TSV technology has attracted wide spread interest in the circuits and devices, packaging and testing communities in the world. As the heart… Show more
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