Modeling and modification of the parallel plate variable MEMS capacitors considering deformation issue

A Comparative Analysis Of MEMS Parallel Plate Actuators

“…Zhang and Fang [9], however, argue that since the moving plate bends when voltage is applied, these estimates are not entirely accurate. They describe the top plate as having three sections (See Fig.…”

“…3), where under each section there is a variance in capacitance induced by the deformation of the top plate. In their paper, Zhang and Fang [9] provide a formulation to compensate for the deformation of the top plate in order to obtain a more accurate pull-in voltage estimate. Their formulation is based on their own design of a parallel plate capacitor (and other similar designs), namely having the support beams on opposite edges (Fig.…”

“…These two equations, however, ignore any deformation the moving plate may experience when voltage is applied. This report uses the work by Zhang and Fang [9] as a benchmark and compares five distinct parallel plate capacitors to determine the generality of their modified formulation for the pull-in voltage calculation. This report also compares the deformations of the moving plate as well as the applied voltages of these five designs.…”

“…This report also compares the deformations of the moving plate as well as the applied voltages of these five designs. Lastly, this report seeks to determine the generality of the formulation by Zhang and Fang [9] and to determine any advantages or disadvantages of various parallel plate designs. [10].…”

Computation of capacitance and electrostatic forces for the electrostatically driving actuators considering fringe effects

“…In micro-electro-mechanical systems (MEMS) devices, such as switch (Naito et al 2010), variable capacitor (BakriKassem and Mansour 2004), resonator (Elshurafa et al 2011), micro mirror (Amaya et al 2011;Kim et al 2009), gyroscope (Guo et al 2010), microtweezer (Harouche and Shafai 2005) microscanner (Ataman and Urey 2006), interferometer (Lee et al 2011), attenuator (Yeh et al 2006), energy harvester , force sensor (Rajagopalan and Saif 2011), etc., electrostatic capacitors are mostly used components, which are contained of movable mechanical structures for electrostatic actuation or capacitive sensing (Amaya et al 2009;Elata and Leus 2005;Tilleman 2004;Carlen et al 2005;Sun et al 2002;Eswaran and Malarvizhi 2012;Zhang and Fang 2009). Accurate estimation of electrostatic forces or driven voltages on the MEMS structures is very important for efficient design and performance even subsequent use of the electrostatically driving devices (Jaecklin et al 1992;Chen and Miao 2007;Kang et al 2009;Harness and Syms 2000;Beyeler et al 2009).…”