Computation of capacitance and electrostatic forces for the electrostatically driving actuators considering fringe effects

Fang, Dongming; Zheng, Fengjie; Chen, Bo; Wang, Yu; Fang, Yigeng; Yang, Pengfei; Xu, Wen; Peng, Chunrong; Xia, Shanhong

doi:10.1007/s00542-014-2322-5

Cited by 7 publications

(2 citation statements)

References 40 publications

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“…Although it neglects the fringing electric field, this approximation is commonly used in the literature. More accurate approximations, including fringing field effects, have also been investigated [20]- [22]. We consider that the capacitanceC i,i between A i and P i is given by:…”

Section: A Elementary Devicementioning

confidence: 99%

Electromechanical Adiabatic Computing: Towards Attojoule Operation

Perrin¹,

Galisultanov²,

Fanet³

et al. 2017

2017 IEEE International Conference on Rebooting Computing (ICRC)

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Considerable efforts have been devoted to the design of low-power digital electronics. However, after decades of improvements and maturation, CMOS technology could face an efficiency ceiling. This is due to the trade-off between leakage and conduction losses inherent to transistors. Consequently, the lowest dissipation per operation remains nowadays few decades higher than the theoretical Landauer's limit (3 zJ at 300 K). Adiabatic CMOS architectures are good candidates for reducing the dynamic losses. But adiabatic operation reduces operating frequency, thus exacerbating the leakage loss. Consequently, transistors could not be the appropriate support for adiabatic logic. In this paper, we bring in a new paradigm for computation. The elementary device which replaces transistor is based on coupled moving masses suspended by springs. Such objects can be fabricated with MEMS in order to provide a relatively high computing speed (in the order of 1 MHz for a micrometerscaled device). In this paradigm, the logic states are encoded mechanically instead of electrically. The computation is performed by means of electrostatic interactions between the moving elements. We show how they can be arranged in order to create combinational logic gates that can be cascaded. Information is injected and extracted electrically, thus allowing compatibility with conventional circuits. We estimate resistive and damping dissipation of the system via electromechanical simulations, for the case of an AND gate. When the gate is driven adiabatically, the energy per operation drops in the range of the attojoule, even with a micrometer-scaled elementary device. This dissipation almost vanishes for lower frequencies of operation. This suggests that electromechanical adiabatic computing (EMAC) could be able to approach Landauer's limit. EMAC could be valuable for devices operating under high energy constrains with low computing power requirements, such as future massively spread environmental sensors.

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Section: A Elementary Devicementioning

confidence: 99%

Electromechanical Adiabatic Computing: Towards Attojoule Operation

Perrin¹,

Galisultanov²,

Fanet³

et al. 2017

2017 IEEE International Conference on Rebooting Computing (ICRC)

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show abstract

“…Reference [9] models the fringe field as a variable serial capacitor in order to consider the fringe electric field. Reference [10] considers the fringe effect and modifies the conventional equations to better estimate the capacitance and the electrostatic force of the driven structures. Consequently, there are many equations that could calculate the capacitance considering the fringe effect but each one has conditions to be able to use…”

mentioning

confidence: 99%

A flexible model for studying fringe field effect on parallel plate actuators

Elshenety

El-Kholy

Abdou

et al. 2020

Journal of Electrical Systems and Inf Technol

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Electrostatic parallel plate actuators are common in micro-electro-mechanical systems due to their compatibility with micro-fabrication technology. Parallel plate actuators suffer from an instability problem called the pull-in phenomenon that happens when the applied DC voltage exceeds a certain value called the static pull-in voltage. The value of this critical voltage is important in many applications that depend on parallel plate actuators such as switches and static gas sensors. The fringe field around the edges of the plates could severely affect the performance of the actuator. This paper introduces a new model for the parallel plate actuator to calculate the value of static pull-in voltage. The proposed model considers the fringe field between the two plates. The static pull-in voltage of some PolyMUMPs actuators is practically measured and compared to the simulation results that involve the fringe field effect. The model is simulated using MATLAB to show the influence of that field on the static pull-in voltage. The MATLAB results of the proposed model are validated with ANSYS.

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Distributed parameter modeling for autonomous charge extraction of various multilevel segmented piezoelectric energy harvesters

Krishnasamy

Lenka

2017

Microsyst Technol

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Computation of capacitance and electrostatic forces for the electrostatically driving actuators considering fringe effects

Cited by 7 publications

References 40 publications

Electromechanical Adiabatic Computing: Towards Attojoule Operation

Electromechanical Adiabatic Computing: Towards Attojoule Operation

A flexible model for studying fringe field effect on parallel plate actuators

Distributed parameter modeling for autonomous charge extraction of various multilevel segmented piezoelectric energy harvesters

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