Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

Tseng, Jian-Zhi; Wu, Chyan-Chyi; Dai, Ching‐Liang

doi:10.3390/s140406722

Cited by 6 publications

(16 citation statements)

References 29 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Leepattarapongpan et al [30] developed an MF microsensor with a 110 mV/T sensitivity. Tseng et al [10] made an MF microsensor whose sensitivity was 354 mV/T. The sensitivity of the MF microsensor in this work was higher than those of all three of these studies.…”

Section: Resultscontrasting

confidence: 39%

“…A standard 0.18 μm CMOS process of Taiwan Semiconductor Manufacturing Company (TSMC) was utilized to make the MF microsensor [10]. According to the MF microsensor model in Figure 1, we designed the layout of the MF microsensor.…”

Section: Fabrication Of Magnetic Field Sensormentioning

confidence: 99%

“…A magnetotransistor mechanism [10] was used to design this 3-axis MF microsensor. Figure 1a demonstrates the three-axis MF microsensor structure.…”

Section: The Design Of Magnetic Field Sensorsmentioning

confidence: 99%

“…Several transducers have been constructed on a smaller scale by a microelectromechanical system (MEMS) process [5][6][7][8]. Compared with traditional sensors, microsensors are easy to mass produce, are of high quality, are small, and have a low cost [9][10][11][12]. Recently, many MF microsensors have been developed utilizing the MEMS method.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

A Three-Axis Magnetic Field Microsensor Fabricated Utilizing a CMOS Process

et al. 2017

Self Cite

View full text Add to dashboard Cite

Featured Application: Three-axis magnetic field microsensors in this study can be applied to various electronic instruments, portable electronic devices, mobile phones, and industrial equipment.Abstract: This study develops a three-axis magnetic field (MF) microsensor manufactured by a complementary metal oxide semiconductor (CMOS) process. The MF microsensor contains a ring emitter, four bases, and eight collectors. Sentaurus TCAD was used to simulate the microsensor characterization. The STI (shallow trench isolation) oxide in the process was used to limit the current direction and reduce leakage current. The microsensor produces a voltage difference once it senses a magnetic field. An amplifier circuitry magnifies voltage difference into a voltage output. Experiments reveals that the MF microsensor has a sensitivity of 1.45 V/T along the x-axis and a sensitivity of 1.37 V/T along the y-axis.

show abstract

Section: Resultscontrasting

confidence: 39%

Section: Fabrication Of Magnetic Field Sensormentioning

confidence: 99%

“…A magnetotransistor mechanism [10] was used to design this 3-axis MF microsensor. Figure 1a demonstrates the three-axis MF microsensor structure.…”

Section: The Design Of Magnetic Field Sensorsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A Three-Axis Magnetic Field Microsensor Fabricated Utilizing a CMOS Process

et al. 2017

Self Cite

View full text Add to dashboard Cite

show abstract

“…Fluxgate magnetometers are typically applied in craft navigation, military detection and medical recognition [3]. So far prospective applications of micro-fluxgates have been considerably developed for modern digital navigation , thoracoscopic surgery , and nondestructive inspection [4]. On device characterization of fluxgate magnetometers, several earlier works concluded that the sensing methodology and sensitivity enhancement by adopting the multiple harmonic frequency analysis techniques are practicable [5].…”

Section: Introductionmentioning

confidence: 99%

Fluxgate Magnetometer with an Orthogonal Flux Guide

Aldoumani¹,

Aldoumani²

2018

IJCA

View full text Add to dashboard Cite

This paper will examine the developed ANSYS model to test advanced materials, i.e. amorphous and metaglas, as well as to optimise the geometry of the fluxgate magnetometer. In other words, the current chapter presents an optimised study of the materials and geometry of the magnetometer which provides savings in terms of material usage as well as the employed electric current to produce an equivalent magnetic field. This design has been developed using the PCB wherein a magnetometer consisting of a planar fluxgate structure with an orthogonal ferromagnetic fluxguide has centrally been situated over the magnetic core. KeywordsAmorphous and metaglas materials, Fluxgate magnetometer, Flux guide, geometry of the magnetometer.

show abstract

Design and Measurement of Microelectromechanical Three-Axis Magnetic Field Sensors Based on the CMOS Technique

Hsu

Tsai

et al. 2023

Micromachines

View full text Add to dashboard Cite

The design, fabrication, and measurement of a microelectromechanical system (MEMS) three-axis magnetic field sensor (MFS) based on the commercial complementary metal oxide semiconductor (CMOS) process are investigated. The MFS is a magnetic transistor type. The performance of the MFS was analyzed employing the semiconductor simulation software, Sentaurus TCAD. In order to decrease the cross-sensitivity of the three-axis MFS, the structure of the MFS is planed to accommodate two independent sensing components, a z-MFS utilized to sense magnetic field (M-F) in the z-direction and a y/x-MFS composed of a y-MFS and a x-MFS to be utilized to sense M-F in the y- and x-directions. The z-MFS incorporates four additional collectors to increase its sensitivity. The commercial 1P6M 0.18 μm CMOS process of the Taiwan Semiconductor Manufacturing Company (TSMC) is utilized to manufacture the MFS. Experiments depict that the MFS has a low cross-sensitivity of less than 3%. The sensitivities of z-, y-, and x-MFS are 237 mV/T, 485 mV/T, and 484 mV/T, respectively.

show abstract

Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

Cited by 6 publications

References 29 publications

A Three-Axis Magnetic Field Microsensor Fabricated Utilizing a CMOS Process

A Three-Axis Magnetic Field Microsensor Fabricated Utilizing a CMOS Process

Fluxgate Magnetometer with an Orthogonal Flux Guide

Design and Measurement of Microelectromechanical Three-Axis Magnetic Field Sensors Based on the CMOS Technique

Contact Info

Product

Resources

About