2022
DOI: 10.1016/j.jmapro.2022.03.038
|View full text |Cite
|
Sign up to set email alerts
|

Modeling and experiment on elastic region low defect jet polishing for fused quartz

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3

Citation Types

0
1
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
8

Relationship

0
8

Authors

Journals

citations
Cited by 10 publications
(3 citation statements)
references
References 16 publications
0
1
0
Order By: Relevance
“…In recent years, jet polishing, as an efficient and environmentally friendly surface treatment technique, has been widely adopted in the field of treating various complex workpieces [15][16][17][18][19][20]. Zhao et al [21] combined Taguchi's method with response surface technology to design a rotating jet polishing method, and carried out jet polishing experiments on the inner wall of 304 stainless steel round tubes with a diameter of 50 mm.…”
Section: Introductionmentioning
confidence: 99%
“…In recent years, jet polishing, as an efficient and environmentally friendly surface treatment technique, has been widely adopted in the field of treating various complex workpieces [15][16][17][18][19][20]. Zhao et al [21] combined Taguchi's method with response surface technology to design a rotating jet polishing method, and carried out jet polishing experiments on the inner wall of 304 stainless steel round tubes with a diameter of 50 mm.…”
Section: Introductionmentioning
confidence: 99%
“…9 Chemical mechanical polishing (CMP) has emerged as the primary processing method for quartz glass due to its high removal rate and low surface roughness. [10][11][12] However, CMP slurry, a crucial material in optical element fabrications, presents distinct challenges. It demands a high level of expertise, involves signicant investment risks, has a lengthy technology accumulation cycle, and relies heavily on economies of scale.…”
Section: Introductionmentioning
confidence: 99%
“…Currently, the intrinsic threshold of quartz materials can exceed 100 J/cm 2 for samples exposed to ultraviolet laser light. However, when the optical element is exposed to 351 or 355 ns laser light, the surface of the sample is susceptible to nonlinear effects, which can cause the sample to break or incur other damage [6,7]. The primary reasons for these damages are related to the damage precursors generated during the process and the environmental contamination of the sample cleaning.…”
Section: Introductionmentioning
confidence: 99%