Modeling and design of novel photo-thermo-mechanical microactuators

Baglio, Salvatore; Castorina, Salvatore; Fortuna, Luigi; Savalli, N.

doi:10.1016/s0924-4247(02)00200-5

Cited by 38 publications

(24 citation statements)

References 7 publications

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“…In deciding the operating frequency of a photothermal microactuator, Baglio et al [10] took the dominant factor in system dynamics to be the cooling time of the actuator, and this cooling was assumed to occur due to free convection on the device surface. To decide the average convection coefficient, the procedure that uses equation (1) was employed.…”

Section: Review Of Modeling Approachesmentioning

confidence: 99%

On heat transfer at microscale with implications for microactuator design

Ozsun¹,

Alaca²,

Yalçınkaya³

et al. 2009

J. Micromech. Microeng.

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The dominance of conduction and the negligible effect of gravity, and hence free convection, are verified in the case of microscale heat sources surrounded by air at atmospheric pressure. A list of temperature-dependent heat transfer coefficients is provided. In contrast to previous approaches based on free convection, supplied coefficients converge with increasing temperature. Instead of creating a new external function for the definition of boundary conditions via conductive heat transfer, convective thin film coefficients already embedded in commercial finite element software are utilized under a constant heat flux condition. This facilitates direct implementation of coefficients, i.e. the list supplied in this work can directly be plugged into commercial software. Finally, the following four-step methodology is proposed for modeling: (i) determination of the thermal time constant of a specific microactuator, (ii) determination of the boundary layer size corresponding to this time constant, (iii) extraction of the appropriate heat transfer coefficients from a list provided and (iv) application of these coefficients as boundary conditions in thermomechanical finite element simulations. An experimental procedure is established for the determination of the thermal time constant, the first step of the proposed methodology. Based on conduction, the proposed method provides a physically sound solution to heat transfer issues encountered in the modeling of thermal microactuators.

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Section: Review Of Modeling Approachesmentioning

confidence: 99%

On heat transfer at microscale with implications for microactuator design

Ozsun¹,

Alaca²,

Yalçınkaya³

et al. 2009

J. Micromech. Microeng.

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“…Equation (1) is written below [6], and is used to calculate the out-of-plane displacement of a thermal bimorph actuator. …”

Section: A Thermal Actuatormentioning

confidence: 99%

Design and integration of a bimorph thermal microactuator with electrostatically actuated microtweezers

Yılmaz

Zervas

Erdem

et al. 2008

2008 Ph.D. Research in Microelectronics and Electronics

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A multi-digit gripper is proposed that consists of two electrostatically actuated end-effectors operating in the plane of the device and three thermal end-effectors operating out of plane. The integration of thermal and electrostatic actuation mechanisms is realized by using a three-mask monolithic process. First mask is used to define the silicon electrostatic actuator on SOI wafer. Second mask is used to obtain the bimorph thermal microactuator made of polyimide and aluminum layers on top of the electrostatic actuator. Third and the final mask is used to release the integrated electrostatic and thermal microactuators.

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“…Optothermal forcing can arise from several physical sources, [3], [32]- [34]. If there is a through the thickness temperature gradient or if the structure is composed of two layers of different materials, then there will be a thermal bending moment.…”

Section: Theoretical Modelmentioning

confidence: 99%

Limit Cycle Oscillations in CW Laser-Driven NEMS

Aubin

Zalalutdinov

Alan

et al. 2004

J. Microelectromech. Syst.

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Abstract-Limit cycle, or self-oscillations, can occur in a variety of NEMS devices illuminated within an interference field. As the device moves within the field, the quantity of light absorbed and hence the resulting thermal stresses changes, resulting in a feedback loop that can lead to limit cycle oscillations. Examples of devices that exhibit such behavior are discussed as are experimental results demonstrating the onset of limit cycle oscillations as continuous wave (CW) laser power is increased. A model describing the motion and heating of the devices is derived and analyzed. Conditions for the onset of limit cycle oscillations are computed as are conditions for these oscillations to be either hysteretic or nonhysteretic. An example simulation of a particular device is discussed and compared with experimental results.[1190]Index Terms-Finite element method (FEM), laser drive, limit cycle oscillation, self-oscillation, thermal stress.

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Modeling and design of novel photo-thermo-mechanical microactuators

Cited by 38 publications

References 7 publications

On heat transfer at microscale with implications for microactuator design

On heat transfer at microscale with implications for microactuator design

Design and integration of a bimorph thermal microactuator with electrostatically actuated microtweezers

Limit Cycle Oscillations in CW Laser-Driven NEMS

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