We report a process to form large-area, few-monolayer graphene oxide films and then recover the outstanding mechanical properties found in graphene to fabricate high Young's modulus ( =185 GPa), low-density nanomechanical resonators. Wafer-scale films as thin as 4 nm are sufficiently robust that they can be delaminated intact and resuspended on a bed of pillars or field of holes. From these films, we demonstrate radio frequency resonators with quality factors (up to 4000) and figures of merit ( f x Q>10(11)) well exceeding those of pure graphene resonators reported to date. These films' ability to withstand high in-plane tension (up to 5 N/m) as well as their high Q-values reveals that film integrity is enhanced by platelet-platelet bonding unavailable in pure graphite.

The ability to detect small amounts of materials, especially pathogenic bacteria, is important for medical diagnostics and for monitoring the food supply. Engineered micro- and nanomechanical systems can serve as multifunctional, highly sensitive, immunospecific biological detectors. We present a resonant frequency-based mass sensor, comprised of low-stress silicon nitride cantilever beams for the detection of Escherichia coli (E. coli)-cell-antibody binding events with detection sensitivity down to a single cell. The binding events involved the interaction between anti-E. coli O157:H7 antibodies immobilized on a cantilever beam and the O157 antigen present on the surface of pathogenic E. coli O157:H7. Additional mass loading from the specific binding of the E. coli cells was detected by measuring a resonant frequency shift of the micromechanical oscillator. In air, where considerable damping occurs, our device mass sensitivities for a 15 μm and 25 μm long beam were 1.1 Hz/fg and 7.1 Hz/fg, respectively. In both cases, utilizing thermal and ambient noise as a driving mechanism, the sensor was highly effective in detecting immobilized anti-E. coli antibody monolayer assemblies, as well as single E. coli cells. Our results suggest that tailoring of oscillator dimensions is a feasible approach for sensitivity enhancement of resonant mass sensors.

Abstract-Limit cycle, or self-oscillations, can occur in a variety of NEMS devices illuminated within an interference field. As the device moves within the field, the quantity of light absorbed and hence the resulting thermal stresses changes, resulting in a feedback loop that can lead to limit cycle oscillations. Examples of devices that exhibit such behavior are discussed as are experimental results demonstrating the onset of limit cycle oscillations as continuous wave (CW) laser power is increased. A model describing the motion and heating of the devices is derived and analyzed. Conditions for the onset of limit cycle oscillations are computed as are conditions for these oscillations to be either hysteretic or nonhysteretic. An example simulation of a particular device is discussed and compared with experimental results.[1190]Index Terms-Finite element method (FEM), laser drive, limit cycle oscillation, self-oscillation, thermal stress.

Micromechanical oscillators in the rf range were fabricated in the form of silicon discs supported by a SiO2 pillar at the disk center. A low-power laser beam, (Plaser∼100 μW), focused at the periphery of the disk, causes a significant change of the effective spring constant producing a frequency shift, Δf(Δf/f∼10−4). The high quality factor, Q, of the disk oscillator (Q∼104) allows us to realize parametric amplification of the disk’s vibrations through a double frequency modulation of the laser power. An amplitude gain of up to 30 was demonstrated, with further increase limited by nonlinear behavior and self-generation. Phase dependence, inherent in degenerate parametric amplification, was also observed. Using this technique, the sensitivity of detection of a small force is greatly enhanced.

We report a method to introduce direct bonding between graphene platelets that enables the transformation of a multilayer chemically modified graphene (CMG) film from a "paper mache-like" structure into a stiff, high strength material. On the basis of chemical/defect manipulation and recrystallization, this technique allows wide-range engineering of mechanical properties (stiffness, strength, density, and built-in stress) in ultrathin CMG films. A dramatic increase in the Young's modulus (up to 800 GPa) and enhanced strength (sustainable stress ≥1 GPa) due to cross-linking, in combination with high tensile stress, produced high-performance (quality factor of 31,000 at room temperature) radio frequency nanomechanical resonators. The ability to fine-tune intraplatelet mechanical properties through chemical modification and to locally activate direct carbon-carbon bonding within carbon-based nanomaterials will transform these systems into true "materials-by-design" for nanomechanics.