Modeling and Analysis of an Optically-Actuated, Bistable MEMS Device

Abstract

Bistable microsystems have drawn considerable interest from the MEMS/NEMS research community not only due to their broad applicability in commercial applications, such as switching, but also because of the rich dynamic behavior they commonly exhibit. While a number of prior investigations have studied the dynamics of bistable microsystems, comparatively few works have sought to characterize their transient behavior. The present effort seeks to address this through the modeling and analysis of an optically-actuated, bistable MEMS switch. This work begins with the development of a distributed-parameter representation for the system, which is subsequently reduced to a lumped-mass analog and analyzed through the use of numerical simulation. The influence of various system and excitation parameters, including the applied axial load and optical actuation profile, on the system’s transient response is then investigated. Ultimately, the methodologies and results presented herein should provide for a refined predictive design capability for optically-actuated, bistable MEMS devices.

Application of Iteration Perturbation Method in studying dynamic pull-in instability of micro-beams

“…Sedighi et al, (2014) investigated the dynamic pull-in instability of vibrating micro-beams undergoing large deflection under electrosatically actuation based on the modified couple stress theory. The modeling and analysis of an optically-actuated, bistable MEMS switches have been studied by Kumar and Rhoads (2012). They investigated the influence of various system and excitation parameters, including the applied axial load and optical actuation profile, on the system's transient response.…”

Jump and pull-in dynamics of an electrically actuated bistable MEMS device

“…Kumar and Rhoads investigate an optically actuated bistable MEMS device [3], Hornstein and Gottlieb multimode dynamics and internal resonances in noncontact atomic force microscopy [4], Cho et al nonlinear hardening and softening response and the switching among them [5], Welte et al parametric resonance and anti-resonance [6], Kacem et al primary and superharmonic resonances [7], Tusset et al chaos control designs [8], Gerson et al pull-in phenomenon in electrically actuated meso scale beams [9], Vyasarayani et al past pull-in behavior [10], Ouakad and Ramini et al response to mechanical shock [11,12] Motivated by the increasing relevance of nonlinear features, the present research study analyzes a theoretical bistable MEMS device, Fig. 1.…”

Effect of the Amplitude of Vibrations on the Pull-in Instability of Double-Sided Actuated Microswitch Resonators

“…Микроэлектромеханические системы (МЭМС) с приводами используются в струйных принтерах, переключателях, гироскопах, химических датчиках и т. п. В работах [1][2][3][4][5][6][7][8][9][10][11][12][13][14] проведены исследования неустойчивости процесса втягивания и динамики МЭМС. Однако влияние величины амплитуды нелинейных колебаний на неустойчивость процесса втягивания до сих пор не изучено.…”

“…Влияние осевой нагрузки и профиля оптического датчика на неустановившийся режим МЭМС с двумя устойчивыми состояниями, приводимой в действие оптическими датчиками, исследовано в [7].…”