2014
DOI: 10.1109/tie.2014.2365754
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Modeling and Analysis of a New Cylindrical Magnetic Levitation Gravity Compensator with Low Stiffness for the 6-DOF Fine Stage

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Cited by 36 publications
(12 citation statements)
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“…Finally, the actual control law of the system is obtained, which makes the whole system achieve the desired performance. 28 Design of contraction backstepping controller. According to the dynamic equation of z-axis in formula ( 12)…”
Section: Design Of Adaptive Contraction Backstepping Controller For Mlpmmentioning
confidence: 99%
“…Finally, the actual control law of the system is obtained, which makes the whole system achieve the desired performance. 28 Design of contraction backstepping controller. According to the dynamic equation of z-axis in formula ( 12)…”
Section: Design Of Adaptive Contraction Backstepping Controller For Mlpmmentioning
confidence: 99%
“…Minimising power dissipation can effectively reduce heat dissipation pressure of the machine and increase the force density of the table. For the refinement stage, to prevent the vibration transmission from the coarse stage to the upper silicon wafer during lithography, the vertical stiffness of the planar tables should be kept as low as possible [24]. The mass of the magnet array determines the volume and inertia of the table.…”
Section: Dimension Optimisation Of Coils and Magnetsmentioning
confidence: 99%
“…Magnetic springs are being researched for use in vibration isolators [1][2][3][4][5][6][7][8][9][10][11][12][13][14], energy scavenging devices [15][16][17], robot actuators [18], as well as permanent magnet bearings [19][20][21][22]. All of the magnet springs that have been studied to-date appear to operate by using the north-south repulsion between vertical magnets [3-8, 17, 18] or horizontally positioned magnets [1-3, 9, 11, 18, 21].…”
Section: Introductionmentioning
confidence: 99%
“…Hol [1] investigated the vibration isolation magnet arrangement as shown in Figure 1(a). In this arrangement, the central magnet is unstable when being centered [7,12,13,22], but as the side magnets are longer than the center magnet, a surprisingly constant force can be created, and this force relationship is shown in Figure 2(a). If the central magnet is made to be the same length as the side magnet, as shown in Figure 1(b), then a remarkably linear force relationship can be created, as illustrated in Figure 2(b).…”
Section: Introductionmentioning
confidence: 99%