Ge quantum dot (QD) layers inserted in an intrinsic region of a Si p-i-n diode cause additional photon absorption at longer wavelengths of the solar spectrum. We studied the mechanism of carrier extraction in Ge/Si QD solar cells using photocurrent, capacitance, and photoluminescence measurements. Our findings show that the photon absorption and carrier extraction in Ge/Si QD solar cells depend strongly on the thermal annealing process to form the p-i-n diode. Control of Ge-Si interdiffusion at the Ge/Si interface during thermal annealing is critical for the increase in the conversion efficiency of Ge/Si QD solar cells. #