1986
DOI: 10.1016/0168-583x(86)90407-6
|View full text |Cite
|
Sign up to set email alerts
|

Model of temperature dependent defect interaction and amorphization in crystalline silicon during ion irradiation

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

2
61
1

Year Published

2003
2003
2021
2021

Publication Types

Select...
4
2
1

Relationship

0
7

Authors

Journals

citations
Cited by 153 publications
(64 citation statements)
references
References 9 publications
2
61
1
Order By: Relevance
“…Probably it is a combination of types of defects. This critical level defect model was extended by Hecking et al [146] to explain their amorphization results of crystalline silicon. This model was modified by Weber [97] and by Zhang et al [148] and named the directimpact/defect-stimulated (DI/DS) model.…”
Section: Amorphizationmentioning
confidence: 99%
“…Probably it is a combination of types of defects. This critical level defect model was extended by Hecking et al [146] to explain their amorphization results of crystalline silicon. This model was modified by Weber [97] and by Zhang et al [148] and named the directimpact/defect-stimulated (DI/DS) model.…”
Section: Amorphizationmentioning
confidence: 99%
“…Fig. 2 shows the results obtained from TRIM simulations [13] for elastic and inelastic energy transfer densities to the silicon lattice for carbon, argon and silicon ions at energies used in this study and that of [6]. Superposed are bar diagrams showing typical depth distributions of collision cascades for a single ion.…”
Section: Discussionmentioning
confidence: 99%
“…Up to now results indicate that in mono-elemental semiconductors the first mechanism dominates, while in some binary materials the reduction of binding energy seems to be more important. However, the results for silicon are based on a re-analysis of measurements done about 20 years ago using an optical reflectivity method [6]. Although many ion implantation studies in silicon have been reported in the literature during the last two decades, most of them could not be used for determining amorphization energies.…”
Section: Introductionmentioning
confidence: 99%
See 2 more Smart Citations