Model-based reasoning for electron-beam debugging of VLSI circuits

Abstract

This article deals with prototype validation of VLSI circuits. Circuits are observed using electron-beam probing used in voltage contrast mode, in such a way that grey level images are obtained and processed in order to determine potential values of connexions. These values are compared against reference values, issued from fault-free simulation of the device under test. The list of discrepancies resulting from comparison constitutes input for a fault localization process done using a knowledge-based system. In this article, the reasons for the choice of such an approach are explained, the approach itself is described; as well as its implementation and the obtained results.