Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon

Ahn, Chang-Nam; Ng, Eldwin J.; Hong, Vu A.; Yang, Yushi; Lee, Brian J.; Flader, Ian B.; Kenny, Thomas W.

doi:10.1109/jmems.2014.2330590

Cited by 112 publications

(51 citation statements)

References 31 publications

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“…As for the structure topologies which mainly affect anchor damping, anchor loss models of simple cantilever beam have been established [46][47][48]. However, for some complex fully 3D resonators, contributions of another geometrical resonators including DETF [21], tether geometry [49][50][51], microsphere [52], cupped [52,53], wineglass [54], hemispherical [39], and disk shapes [55][56][57] to anchor loss are calculated hard by the analytical solution if no simplifying assumption is present. Damping loss model on accurately estimating the experiment results for these complex structure topology is very limited.…”

Section: Introductionmentioning

confidence: 99%

Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

Zhou

Shen

Xie

et al. 2018

Shock and Vibration

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Energy dissipation contribution of micro-machined Coriolis vibratory gyroscope (MCVG) is modeled, numerically simulated, and experimentally verified in this paper. First, the amount of independent damping dissipation consisting of thermoelastic loss, anchor loss, surface loss, Akhiezer loss, and air damping loss during vibration is obtained by simulation model, PML-based method, and numerical calculation, respectively. Then, temperature and pressure dependence characteristic of the corresponding quality factor (Q) for the MCVG are obtained. Meanwhile, dominant sources of damping dissipation are determined, which paves the way to improve Q. Finally, the temperature-dependent and pressure-dependent characteristics of the total Q are measured with errors of less than 10% and 18% compared with the simulated total Q, respectively, in which accuracy is acceptable for predicting the damping dissipation behavior of MCVG in design stage before high-cost fabrication.

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Section: Introductionmentioning

confidence: 99%

Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

Zhou

Shen

Xie

et al. 2018

Shock and Vibration

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“…Microelectromechanical system (MEMS) vibratory gyroscopes are usually characterized by low cost, low power consumption, small size, and high reliability [1,2,3]. However, the low accuracy and performance of MEMS gyroscopes has restricted their development and applications to date [4].…”

Section: Introductionmentioning

confidence: 99%

Dynamic Performance Comparison of Two Kalman Filters for Rate Signal Direct Modeling and Differencing Modeling for Combining a MEMS Gyroscope Array to Improve Accuracy

Yuan

Xue

et al. 2015

Sensors

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In this paper, the performance of two Kalman filter (KF) schemes based on the direct estimated model and differencing estimated model for input rate signal was thoroughly analyzed and compared for combining measurements of a sensor array to improve the accuracy of microelectromechanical system (MEMS) gyroscopes. The principles for noise reduction were presented and KF algorithms were designed to obtain the optimal rate signal estimates. The input rate signal in the direct estimated KF model was modeled with a random walk process and treated as the estimated system state. In the differencing estimated KF model, a differencing operation was established between outputs of the gyroscope array, and then the optimal estimation of input rate signal was achieved by compensating for the estimations of bias drifts for the component gyroscopes. Finally, dynamic simulations and experiments with a six-gyroscope array were implemented to compare the dynamic performance of the two KF models. The 1σ error of the gyroscopes was reduced from 1.4558°/s to 0.1203°/s by the direct estimated KF model in a constant rate test and to 0.5974°/s by the differencing estimated KF model. The estimated rate signal filtered by both models could reflect the amplitude variation of the input signal in the swing rate test and displayed a reduction factor of about three for the 1σ noise. Results illustrate that the performance of the direct estimated KF model is much higher than that of the differencing estimated KF model, with a constant input signal or lower dynamic variation. A similarity in the two KFs’ performance is observed if the input signal has a high dynamic variation.

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“…To overcome this limitation, we study synchronization using a micromachined disk resonator (MDR) originally designed to operate as a mode-matched gyroscope. 28 Mode-shape specific frequency-tuning electrodes enable the resonant frequency of the first mode to be voltage-controlled, independent of the frequency of the second mode. This capability enables us to study the synchronization range as a function of the frequency and amplitude of the two modes.…”

mentioning

confidence: 99%

“…Note that, while a perfect disk exhibits degenerate cosðnhÞ, sinðnhÞ mode pairs, fabrication imperfections split the frequencies of these pairs such that they are separated by more than the 100 Hz measured frequency range. 28 In this letter, the first mode of interest is an n ¼ 3 mode (referred to as 3h mode) and has a resonance frequency of f 1 ¼ 278 kHz and a quality factor of Q 1 ¼ 15 000. The second mode is an n ¼ 9 mode (referred to as 9h mode) with Q 2 ¼ 60 000 and was selected because it has a resonance frequency that is nearly a harmonic of the first frequency (f 2 % 3 f 1 ).…”

mentioning

confidence: 99%

Mutual 3:1 subharmonic synchronization in a micromachined silicon disk resonator

Taheri-Tehrani

Guerrieri

Defoort

et al. 2017

Applied Physics Letters

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We demonstrate synchronization between two intrinsically coupled oscillators that are created from two distinct vibration modes of a single micromachined disk resonator. The modes have a 3:1 subharmonic frequency relationship and cubic, non-dissipative electromechanical coupling between the modes enables their two frequencies to synchronize. Our experimental implementation allows the frequency of the lower frequency oscillator to be independently controlled from that of the higher frequency oscillator, enabling study of the synchronization dynamics. We find close quantitative agreement between the experimental behavior and an analytical coupled-oscillator model as a function of the energy in the two oscillators. We demonstrate that the synchronization range increases when the lower frequency oscillator is strongly driven and when the higher frequency oscillator is weakly driven. This result suggests that synchronization can be applied to the frequency-selective detection of weak signals and other mechanical signal processing functions.

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Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon

Cited by 112 publications

References 31 publications

Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

Dynamic Performance Comparison of Two Kalman Filters for Rate Signal Direct Modeling and Differencing Modeling for Combining a MEMS Gyroscope Array to Improve Accuracy

Mutual 3:1 subharmonic synchronization in a micromachined silicon disk resonator

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