Mode-Localized Displacement Sensing

Thiruvenkatanathan, Pradyumna; Seshia, Ashwin A.

doi:10.1109/jmems.2012.2198047

Cited by 59 publications

(34 citation statements)

References 11 publications

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“…We plot the simulated mode frequencies of the in-phase and out-of-phase modes, as well as theoretically calculated values using (11) and (12) in Fig. 4.…”

Section: A Mode Frequenciesmentioning

confidence: 99%

“…F 1 (s) only); hence, here we only focus on the vibrational amplitudes at the out-of-phase mode. Substituting (12) into Equations (7), (8) and (9), we can obtain the vibrational responses of resonator 1, 2 and 3 at the out-of-phase mode as a function of K and F(s):…”

Section: B Vibrational Amplitudesmentioning

confidence: 99%

“…The advantages of the new type of resonant sensor include enhancement in sensitivity [9], the capability of detecting the position of perturbation by monitoring only one output [3] and an inherent capability of common mode rejection [10]. The applications include mass sensing [2], stiff-ness change sensing [6], accelerometers [11] and displacement sensing [12].…”

Section: Introductionmentioning

confidence: 99%

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A Comparative Study of Output Metrics for an MEMS Resonant Sensor Consisting of Three Weakly Coupled Resonators

Zhao

Wood

Xie

et al. 2016

J. Microelectromech. Syst.

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This paper systematically investigates the characteristics of different output metrics for a weakly coupled three degree-of-freedom microelectromechanical systems resonant sensor. The key figures-of-merit examined are sensitivity and linear range. The four main output metrics investigated are mode frequency shift, amplitude difference, amplitude ratio, and eigenstate shift. It is shown from theoretical considerations, equivalent RLC circuit model simulations and electrical measurements, that there is a strong tradeoff between sensitivity and linear range. For instance, the amplitude difference has the best sensitivity but the worst linear range, whereas frequency shift has the widest linear range but the lowest sensitivity. We also show that using the vibrational amplitude ratio as an output metric provides the best balance between sensitivity and linear range. [2016-0077]Index Terms-Output metrics, frequency shift, amplitudebased output signals, weakly coupled microelectromechanical systems (MEMS) resonant sensors.

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“…We plot the simulated mode frequencies of the in-phase and out-of-phase modes, as well as theoretically calculated values using (11) and (12) in Fig. 4.…”

Section: A Mode Frequenciesmentioning

confidence: 99%

Section: B Vibrational Amplitudesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A Comparative Study of Output Metrics for an MEMS Resonant Sensor Consisting of Three Weakly Coupled Resonators

Zhao

Wood

Xie

et al. 2016

J. Microelectromech. Syst.

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“…It was demon-20 strated that by measuring the eigenstates shift caused by mode localization, orders of magnitude improvement in sensitivity of mass change was observed [10]. Various groups demonstrated that orders of magnitude enhancement in sensitivity of stiffness change [12,13,14,15] and force [16] could be achieved using this approach. Another advantage of this type of device is its intrinsic 25 common mode rejection [17].…”

mentioning

confidence: 99%

A force sensor based on three weakly coupled resonators with ultrahigh sensitivity

Zhao

Wood

Xie

et al. 2015

Sensors and Actuators A: Physical

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A force sensor based on three weakly coupled resonators with ultrahigh sensitivity, Sensors & Actuators: A. Physical (2015), http://dx.doi.org/10.1016/j.sna. 2015.05.011 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. AbstractA proof-of-concept force sensor based on three degree-of-freedom (DoF) weakly coupled resonators was fabricated using a silicon-on-insulator (SOI) process and electrically tested in 20µTorr vacuum. Compared to the conventional single resonator force sensor with frequency shift as output, by measuring the amplitude ratio of two of the three resonators, the measured force sensitivity of the 3DoF sensor was 4.9 × 10 6 /N, which was improved by two orders magnitude. A bias stiffness perturbation was applied to avoid mode aliasing effect and improve the linearity of the sensor. The noise floor of the amplitude ratio output of the sensor was theoretically analyzed for the first time, using the transfer function model of the 3DoF weakly coupled resonator system. It was shown based on measurement results that the output noise was mainly due to the thermalelectrical noise of the interface electronics. The output noise spectral density was measured, and agreed well with theoretical estimations. The noise floor of the force sensor output was estimated to be approximately 1.39nN for an assumed 10Hz bandwidth of the output signal, resulting in a dynamic range of 74.8dB.

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“…Mode localization to j th resonator is also shown, where a1 and aj are modal amplitudes of first and j th resonators respectively. provements in sensitivity have been achieved and novel MEMs sensors for sensing mass [12,15,16], displacement [17], acceleration [18,19], electrometer [20,21] have emerged. The eigenvector sensitivity is exploited in these sensing technologies.…”

Section: Introductionmentioning

confidence: 99%

Mode Localization and Sensitivity in Weakly Coupled Resonators

2019

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Localization of normal modes is used in recent microelectromechanical systems (MEMS) technologies with orders of magnitude improvements in sensitivity. A pair of eigenvalues veer, or avoid crossing each other, as a single parameter of a vibrating system is varied. While it is well-known that the sensitivity (s) of modal amplitude ratio varies with strength of coupling (κ) as s ∝ κ −1 in the case of two identical coupled oscillators, recently, we showed that asymmetry α will also influence sensitivity according to s ∝ (ακ) −1 . Here, we show that further enhancements in sensitivity is possible in higher degrees of freedom (n) systems using energy analysis. In the case of n − 2 uniformly coupled oscillators embedded between two oscillators, we show that s ∝ α −1 κ 1−n , if the blocked resonance spectra of the embedded oscillators and the end oscillators are well-separated. We also show that asymmetric coupled oscillators also enhance linear range in addition to sensitivity when compared to their symmetric counterparts. We do not use a perturbation approach in our energy analysis; hence the sensitivity and linear range expressions derived have a wider range of accuracy. * srikanth@mech.ubc.ca † edmondc@ece.ubc.ca −0.2 −0.1

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Mode-Localized Displacement Sensing

Cited by 59 publications

References 11 publications

A Comparative Study of Output Metrics for an MEMS Resonant Sensor Consisting of Three Weakly Coupled Resonators

A Comparative Study of Output Metrics for an MEMS Resonant Sensor Consisting of Three Weakly Coupled Resonators

A force sensor based on three weakly coupled resonators with ultrahigh sensitivity

Mode Localization and Sensitivity in Weakly Coupled Resonators

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