Mode localization analysis and characterization in a 5-beam array of coupled nearly identical micromechanical resonators for ultra-sensitive mass detection and analyte identification

Wang, Dong F.; Chatani, Keisuke; Ikehara, Tsuyoshi; Maeda, Ryutaro

doi:10.1007/s00542-012-1520-2

Cited by 41 publications

(21 citation statements)

References 18 publications

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“…For a 5-resonator array (SCS) without a small mass perturbation [21][22], the vibration characteristics were complicated, and the analytical results were also found to be not clearly corresponding to the experimental ones, based on a micro-fabricated 5-resonator array (SCS) device for comparative study.…”

Section: Vibration Mode Localizationmentioning

confidence: 91%

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Mode localization in coupled AlN/SCS cantilevers for highly sensitive resonating flow meter

Kozuka

Wang

Ikehara³

et al. 2013

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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The use of vibration mode localization in arrays of mechanically-coupled, nearly identical beam-shaped resonators has been studied for ultra-sensitive mass detection and analyte identification. Our recent work (NEMS 2012) focused on enhancing the amount of amplitude change due to vibration mode localization with a beam shaped 3-resonator array. The preliminarily results were discussed from view point of vibration characteristic by comparing experimental results with analytical ones, without a small mass perturbation. The present study however try to apply the consequent amplitude change to resonating-based flow meter with a simplified system of beam shaped 2-resonator array (AlN/SCS). The possible application has been analytically discussed from view point of vibration characteristic with a small mass perturbation.

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Section: Vibration Mode Localizationmentioning

confidence: 91%

“…In our previous work, the effect of different geometrical designs of the coupling overhang [21][22] on the relative change (%) of amplitude shifts was theoretically studied using a coupled 15-resonator array (SCS) for each vibration mode before and after a small mass perturbation of 10pg.…”

Section: Vibration Mode Localizationmentioning

confidence: 99%

Mode localization in coupled AlN/SCS cantilevers for highly sensitive resonating flow meter

Kozuka

Wang

Ikehara³

et al. 2013

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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“…However, using a SCS five-resonator array without a small mass perturbation [21,22], the vibration characteristics were complicated and the…”

Section: Amplitude Change Enhancement By Vibration Mode Localisationmentioning

confidence: 99%

“…Considering the case of two initially identical resonators, the relative change in normalised eigenstate u is given by the authors [17,[21][22][23][24][25] …”

Section: Micromachined or Mems Flow Sensorsmentioning

confidence: 99%

“…Secondly, such sensors can offer important advantages to intrinsic common-mode rejection that renders it less susceptible to false-positive readings than frequency-shift-based sensors. Finally, both the ultra-sensitive detection and analyte identification of small perturbation can be achieved at the same time with a single coupled resonator array.This kind of relative changes in eigenstates was experimentally studied in [17] using a coupled single crystal silicon (abbreviated as SCS hereafter) two-resonator array and concluded that the relative change in eigenstates because of the added mass could be two orders of magnitude greater than the relative change in resonance frequency.In our previous Letter, the effect of different geometrical designs of the coupling overhang (coupling spring) [21,22] on the relative change (%) in the amplitude was theoretically studied using a coupled SCS 15-resonator array for each vibration mode before and after a small mass perturbation of 10 pg. However, using a SCS five-resonator array without a small mass perturbation [21,22], the vibration characteristics were complicated and the…”

mentioning

confidence: 99%

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Analytical studies on amplitude change enhancement in coupled aluminium nitride coated single crystal silicon oscillator pair applicable to ultra‐sensitive resonating microfluidic flowmeters

Wang

Chatani

Kozuka

et al. 2013

Micro & Nano Letters

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The use of vibration mode localisation in arrays of micromechanically coupled, nearly identical beam-shaped resonators has been analytically studied for ultra-sensitive resonating-based flowmeters. Eigenstate shifts (amplitude change in this Letter) that are about two times (compared with the single resonator), and orders (compared with the resonator array) of magnitude greater than corresponding shifts in resonant frequency for an induced fluid flow (corresponding to an induced small mass perturbation) are preliminarily obtained by theoretical analysis. When an external force of 100 Pa, corresponding to an estimated fluid flow velocity of about 3.15 m/s, is applied to any one (because of the symmetrical design) of the two coupled aluminium nitride coated single crystal silicon resonators, two orders of the amplitude enhancement can be observed for both the resonators at the higher (second) resonance frequency because of vibration mode localisation, which implies the application possibility to highly sensitive resonating-based flow sensors.1. Micromachined or MEMS flow sensors: The measurement of fluid flow rates is an essential requirement in both industrial and commercial applications. It has been estimated by Hayward [1] that there are more than one hundred different types of flow sensors with a mode of operation based on almost any physical domain. Although several large-scale flowmeter types are commercially available, the continuous development of the three-dimensional techniques of microfabrication and MEMS, with consequent cost reduction and quality improvement, has rapidly extended the market of micromachined or MEMS flow sensors. In particular, applications of micromachined or MEMS sensors to monitor gas and liquid flows hold immense potential because of their valuable characteristics, such as low-energy consumption, relatively good accuracy, the ability to measure very small flow, small size and so on.After the first integrated silicon-based sensor for gas flow measurement [2] appeared in 1974, a higher growth of research works in the field of micromachined or MEMS flow sensors took place in the eighties and about a decade was needed to develop the integration of many microfluidic devices into a single chip [3,4].Based on the working principles, the micromachined or MEMS flow sensors can be distinguished into two groups [5]. The first group contains flow sensors based on heat exchange, named 'thermal flow sensors'; whereas all the other flowmeters based on different working principles rather than thermal exchange, are thus named as 'non-thermal flow sensors', which are also divided into several subgroups depending on the principle of measurement used like cantilever flow sensors, differential pressure-based flow sensors, resonating flow sensors and laser Doppler flowmeters. Amplitude change enhancement by vibration mode localisation:The micro resonator sensor [6-10] is used to detect external stimulus, that is, force, mass, molecular as well as atomic adsorption and so on. The amount of relative change...

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A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

Ghaemi

Nikoobin

Ashory

2022

Adv Elect Materials

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Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical resonators, provide an unprecedented platform for investigating a wide range of applications in both fundamental physical phenomena (such as quantum‐level problems) and engineering and applied sciences (like sensing physical quantities and signal processing). In sensing context, these tiny resonators are invaluable tools for detecting weak forces and single molecules. Measuring such small variations in sub‐nanometer amplitudes at high frequencies has created many practical challenges. Therefore, maximizing the responsivity to a specified input parameter and minimizing the responsivity to other inputs such as noise are considered as the optimal design for the excellent performance in nanoresonators. The present review aims to summarize some of the recent progress in this rapidly advancing field. Specifically, more attention is paid to the topics related to the dynamical behaviors of micro/nanoresonator and their practical applications. First, the theory behind micro/nanoresonators is described. Then a summary is presented of the basic concepts in resonant devices. In addition, several commonly dynamical techniques to enhance sensitivity are introduced. Finally, the devices are classified based on linear and nonlinear, single and array, symmetric and asymmetric, and frequency shift‐based and amplitude shift‐based resonators, along with the relative advantages and disadvantages of each one in engineering applications.

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Mode localization analysis and characterization in a 5-beam array of coupled nearly identical micromechanical resonators for ultra-sensitive mass detection and analyte identification

Cited by 41 publications

References 18 publications

Mode localization in coupled AlN/SCS cantilevers for highly sensitive resonating flow meter

Mode localization in coupled AlN/SCS cantilevers for highly sensitive resonating flow meter

Analytical studies on amplitude change enhancement in coupled aluminium nitride coated single crystal silicon oscillator pair applicable to ultra‐sensitive resonating microfluidic flowmeters

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

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