Mode localization in coupled AlN/SCS cantilevers for highly sensitive resonating flow meter

Abstract

The use of vibration mode localization in arrays of mechanically-coupled, nearly identical beam-shaped resonators has been studied for ultra-sensitive mass detection and analyte identification. Our recent work (NEMS 2012) focused on enhancing the amount of amplitude change due to vibration mode localization with a beam shaped 3-resonator array. The preliminarily results were discussed from view point of vibration characteristic by comparing experimental results with analytical ones, without a small mass perturbation. The present study however try to apply the consequent amplitude change to resonating-based flow meter with a simplified system of beam shaped 2-resonator array (AlN/SCS). The possible application has been analytically discussed from view point of vibration characteristic with a small mass perturbation.