Mode II adhesion energy analysis of stiction-failed poly-Si $\mu$ cantilevers using a MEMS load cell

Mousavi, Behnam Kheyraddini; Mousavi, Arash Kheyraddini; Hieber, Tyler J.; Chen, James M.; Leseman, Zayd Chad

doi:10.1088/1361-6439/ab173e

Cited by 8 publications

(2 citation statements)

References 26 publications

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“…In such applications, designers are mainly concerned with the percentage of light transmitted into/out of the substrate and are not concerned with beam quality. On the other hand, for coupling light out of laser cavities (particularly semiconductor lasers), the absence of diffraction or scattering of the transmitted light is critical for maintaining the quality of the laser beam [3] [31] [39]. When made of same material as the transmission medium, the nanostructured antireflections can tolerate high laser powers.…”

Section: Introductionmentioning

confidence: 99%

Nanostructured Anti-Reflection Coatings for Enhancing Transmission of Light

Mousavi¹,

Mousavu²,

Busani³

et al. 2019

JAMP

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Nanostructured, sub-wavelength anti-reflection layers (NALs) have attracted much attention as a new generation of anti-reflection surfaces. Among different designs, sub-wavelength periodic nanostructures are capable of enhancing transmission of coherent light through an interface without inducing scattering. In this work, we have explored a new profile for periodic NALs capable of transmitting IR light with higher efficiency compared to NALs based on a parabolic profile. To achieve high transmission and low diffraction, the profile and pitch of the nanostructured NALs are calculated using a combination of a multi-layer modeling and Rigorous Coupled Wave (RCWA) analysis.available materials with desired refractive indexes. Also, the mismatch between the thermal expansion coefficients of different layers, introduces residual stresses under high power illumination (this is a serious limitation for mechanical stability [6], and for applications like high power laser transmission particularly in the infrared where thicker layers are required) [7] [8].Nanostructured ARC layers (NALs [9]) on the other hand, work by a gradual, adiabatic change of effective refractive index from that of the incidence medium (air) to that of the bulk material (silicon in our case). These structures are also referred as moth-eye structures [10] due to their resemblance to the surface of a moth's eye [11]. In this paper, we will refer to nanostructures designed for re-

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Section: Introductionmentioning

confidence: 99%

Nanostructured Anti-Reflection Coatings for Enhancing Transmission of Light

Mousavi¹,

Mousavu²,

Busani³

et al. 2019

JAMP

Self Cite

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“…Also, when a high-power beam of light passes through them, these layers peel off the substrate [5] due to the difference in the expansion coefficient of different materials. Recently, nanotechnology and nanostructures [6] [7] [8] [9] have solved many problems in technology introducing materials [10] that exhibit special characteristics electrically, mechanically [11]- [15] and when they're under illuminations of light [6] [7] [16] [17]. Fabrication method of these nanomaterials [6] [18] [19] usually depends on the type of the materials and the physical characteristics they're designed for.…”

Section: Introductionmentioning

confidence: 99%

Optimizing Motheye Nanostructures and Achieving 100% Transmission

Mousavi¹,

Talarposhti²

2020

JAMP

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Nanostructured Antireflections Layers (NALs) are a promising substitute for conventional antireflection layers. In the nature, such structures have long existed on insects' eyes. Here, we have derived a general form of mathematical relation that generates a profile close to that of surface of a Moth's eye. By properly designing NALs over dielectric, light has been efficiently transmitted through our high index nanostructures with minimal reflection. The parameters determining the transmission efficiency are the pitch and the profile of the periodic nanostructures. By optimizing the profile, we have designed NALs with transmission reaching 100%. Our periodic structures have minimal dependence on the pitch. This makes it possible to fabricate NALs with the very broadband transmission, without inducing diffraction to lower wavelengths of the transmitted light. Also, our periodic NALs make it possible to transmit laser lights without scattering.

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Design of a Microscale Optomechanical Load Cell for Micro-/Nanostructured Materials Testing Applications

Leseman

2021

Arab J Sci Eng

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Mode II adhesion energy analysis of stiction-failed poly-Si $\mu$ cantilevers using a MEMS load cell

Cited by 8 publications

References 26 publications

Nanostructured Anti-Reflection Coatings for Enhancing Transmission of Light

Nanostructured Anti-Reflection Coatings for Enhancing Transmission of Light

Optimizing Motheye Nanostructures and Achieving 100% Transmission

Design of a Microscale Optomechanical Load Cell for Micro-/Nanostructured Materials Testing Applications

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