Mode Identification of Electromagnetic Waves for Large-Area Planar RF Plasma Productions

Nonaka, Shigehiko

doi:10.1143/jpsj.61.1449

Cited by 12 publications

(3 citation statements)

References 1 publication

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“…Another possibility for SWCH application is for the gas discharges produced and sustained by surface wave propagation. Discharges of this kind have been shown to be useful in several semiconductor technologies (Nonaka 1990(Nonaka , 1992 in plasma chemistry, for the design of new ion sources and so on (Moisan et al 1982, Moisan andZakrzewski 1986). In our opinion, SWCH would be perspective waves for this goal not only because they would be the eigenmodes of the discharge chamber but also because their frequency is close to the harmonics of electron cyclotron frequencies.…”

Section: Discussionmentioning

confidence: 99%

Surface waves on the harmonics of the electron cyclotron frequency propagating along a plasma - metal interface

Azarenkov¹,

Girka²,

Kondratenko³

et al. 1997

Plasma Phys. Control. Fusion

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Dispersion properties of slow electromagnetic surface waves propagating on the harmonics of the electron cyclotron frequency across the external steady magnetic field are studied in the case when the magnetic field is parallel to the plasma-metal interface. Theoretical investigation of these surface modes is carried out using the kinetic description under the condition of weak plasma spatial dispersion, when the radii of the charged plasma particles' Larmor rotation are much less than the spatial scale of the considered wave perturbation. The effect of the plasma density transverse inhomogeneity, of plasma particles' concentration and of the external magnetic field value on the dispersion properties of the surface waves on electron cyclotron harmonics (SWCH) is researched.

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Section: Discussionmentioning

confidence: 99%

Surface waves on the harmonics of the electron cyclotron frequency propagating along a plasma - metal interface

Azarenkov¹,

Girka²,

Kondratenko³

et al. 1997

Plasma Phys. Control. Fusion

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“…Parameters of such discharges depend on many factors, among them: geometry and constructive peculiarities of the discharge chamber, pressure and kind of operating gas, value and orientation of external steady magnetic field, type of used electromagnetic SW and so on [3][4][5][6][7]. There are some works devoted to experimental and theoretical studies of the gas discharge in chambers with planar geometry [8][9][10]. But majority of articles are connected with experiments for gas discharges in chambers with cylindrical geometry that have a relatively small radius see e.g.…”

Section: Introductionmentioning

confidence: 99%

Microwave Gas Discharge Sustained by the Azimuthal Surface Waves

Azarenkov

Girka

Pavlenko

2000

Contrib. Plasma Phys.

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A theoretical model of plasma source based on azimuthal surface waves (ASW) propagation in a plasma filled cylindrical metal waveguide is presented. The ASW propagate across an external axial steady magnetic field and posses the eigenfrequencies in the range between upper hybrid frequency and the cut‐off frequency for HF bulk wave. The problem is studied using a local hydrodynamic approach and taking into consideration a collisional wave damping. Spatial distributions of the ASW fields and produced plasma density are examined both analytically and numerically.

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“…4,17) The existence of surface wave modes was suggested as a part of the interpretation of the results obtained in a large-area plasma apparatus equipped with two large-area plane electrodes. 18) Normally, in the case of planar large-area surface wave plasma sources, the top wall is made by a dielectric, so that the plasma is generated in the vicinity of the dielectric. From this region, the plasma diffuses to the discharge chamber and its density decreases exponentially along with the distance from the dielectric.…”

Section: Introductionmentioning

confidence: 99%

Investigation of Quartz Side Wall Influence on Radial Plasma Density Profiles in Low-Pressure Surface Wave Plasma Source

Širý

Sakata

Terebessy

et al. 2006

jjap

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The influence of a quartz side wall on plasma production was studied in a large-area surface wave plasma source. An enhanced plasma production was observed in the vicinity of the quartz side wall and is explained by the propagation of the surface wave coupled from the bottom quartz plate to the quartz side wall. This was confirmed by measuring the electromagnetic field intensity and the wavelength of the surface wave propagating along the side wall. Additionally, the plasma density was obtained by two different methods, that is, calculation using the dispersion relation and measurement using a Langmuir probe. It was found that the surface wave propagates along the quartz side wall in the direction perpendicular to the slot antenna axis, resulting in plasma production. As a consequence, the radial plasma density becomes more uniform in the region with the quartz side wall than in the region with a metal side wall.

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Mode Identification of Electromagnetic Waves for Large-Area Planar RF Plasma Productions

Cited by 12 publications

References 1 publication

Surface waves on the harmonics of the electron cyclotron frequency propagating along a plasma - metal interface

Surface waves on the harmonics of the electron cyclotron frequency propagating along a plasma - metal interface

Microwave Gas Discharge Sustained by the Azimuthal Surface Waves

Investigation of Quartz Side Wall Influence on Radial Plasma Density Profiles in Low-Pressure Surface Wave Plasma Source

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