MoCl<sub>5</sub>intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene

Miyazaki, Hisao; Matsumoto, Rikio; Katagiri, Masayuki; Yoshida, Takashi; Ueno, Kazuyoshi; Sakai, Tadashi; Kajita, Akihiro

doi:10.7567/jjap.56.04cp02

Cited by 20 publications

(13 citation statements)

References 32 publications

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“…Table 1 compares the electrode developed by us with other electrodes in the literature in terms of optical transmittance, sheet resistance, and mechanoelectrical stability. Although intercalation doping has been reported to improve the conductivity of graphene for TCEs, [22][23][24]29,36 there is no work attempted to investigate its mechano-electrostability toward stretchable electrodes. On the other hand, most reported graphene-based stretchable conductors utilized a large amount of relatively low-quality graphene flakes or rGO and were not transparent.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

Transparent and Stretchable Graphene Electrode by Intercalation Doping for Epidermal Electrophysiology

Jiang

Zhang

et al. 2020

ACS Appl. Mater. Interfaces

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Epidermal electronics is regarded as the nextgeneration technology, and graphene is a promising electrode, which is a key building block of such devices. However, graphene has a tendency to crack at small strains with a rapidly increased resistance upon stretching. Here, to enable graphene applicable in epidermal electronics, we designed a novel graphene structure that is molybdenum chloride (MoCl 5 )-intercalated few-layer graphene (Mo-FLG) fabricated in a confined environment. In the case of bilayer graphene (BLG), MoCl 5 -intercalated bilayer graphene (Mo-BLG) exhibited a low sheet resistance of 40 Ω/square (sq) at a transmittance of 80%. Due to the self-barrier doping effect, the sheet resistance increased to only 60 Ω/sq after exposing to the atmosphere over 1 month. Transferred onto elastomer substrates, Mo-BLG can work as an electrode up to 80% strain and maintain a high conductivity that is durable over 2000 cycles at 30% strain. This mechano-electrostability is attributed to the special intercalated structure where the intercalated dopants act as lubricants to weaken the layer−layer interaction and allow a certain degree of sliding, as well as electrical crack-connectors to bridge the cracked domains at a high strain. Mo-BLG can be applied as epidermal electrodes to monitor electrophysiological signals such as electrocardiogram (ECG), electrooculogram (EOG), electroencephalography (EEG), and surface electromyogram (sEMG) with high signal-to-noise ratios (SNRs) comparable to commercial Ag/AgCl electrode. This is the first demonstration of epidermal electrodes based on intercalation-doped graphene applied in health monitoring, shedding light on the future development of graphene-based epidermal electronics.

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Section: ■ Results and Discussionmentioning

confidence: 99%

Transparent and Stretchable Graphene Electrode by Intercalation Doping for Epidermal Electrophysiology

Jiang

Zhang

et al. 2020

ACS Appl. Mater. Interfaces

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“…The increase in the thickness of glassy graphene would lead to an increase in conductivity, resulting in a larger initial channel current I 0 . However, owing to the surface screening effect limiting the penetration of VOC molecules [60,61,65], only a few uppermost layers of multilayer glassy graphene are involved in VOC detection, and thus it contributes to the response current close to the value obtained from the FGD. According to the definition of sensitivity, (I -I 0 )/I 0 (%), it is reasonable to obtain reduced sensitivity with increased thickness, and SNR is affected in a similar way.…”

Section: Articlesmentioning

confidence: 95%

“…Furthermore, the channel current decreased during acetone desorption, resulting from the increased space charge width (tending to be W1 again) caused by the gradually restored Fermi level of glassy graphene. According to former studies regarding multilayer graphene, doping from air-induced absorbate can only be effective in a few top layers due to the surface screening effect, and thus the other layers remain unaffected [60,61]. Accordingly, air exposure can presumably leave much less apparent impacts on multilayer glassy graphene than few-layer glassy graphene, resulting in negligible change of the Fermi level.…”

Section: Science China Materialsmentioning

confidence: 99%

Multifunctional two-dimensional glassy graphene devices for vis-NIR photodetection and volatile organic compound sensing

Xiao

Dai

et al. 2021

Sci. China Mater.

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Multifunctional devices are of great interest for integration and miniaturization on the same platform, but simple addition of functionalities would lead to excessively large devices. Here, the photodetection and chemical sensing device is developed based on two-dimensional (2D) glassygraphene that meets similar property requirements for the two functionalities. An appropriate bandgap arising from the distorted lattice structure enables glassy graphene to exhibit comparable or even improved photodetection and chemical sensing capability, compared with pristine graphene. Due to strong interactions between glassy graphene and the ambient atmosphere, the devices are less sensitive to photoinduced desorption than the ones based on graphene. Consequently, the few-layer glassy graphene device delivers positive photoresponse, with a responsivity of 0.22 A W −1 and specific detectivity reaching~10 10 Jones under 405 nm illumination. Moreover, the intrinsic defects and strain in glassy graphene can enhance the adsorption of analytes, leading to high chemical sensing performance. Specifically, the extracted signalto-noise-ratio of the glassy graphene device for detecting acetone is 48, representing more than 50% improvement over the device based on graphene. Additionally, bias-voltage-and thickness-dependent volatile organic compound (VOC) sensing features are identified, indicating the few-layer glassy graphene is more sensitive. This study successfully demonstrates the potential of glassy graphene for integrated photodetection and chemical sensing, providing a promising solution for multifunctional applications further beyond.

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“…Although Br 2 and FeCl 3 are efficient intercalates, their stability in narrow patterns of micrometer size is an issue, and MoCl 5 has better stability in narrower patterns. 46,47) Figure 8(a) shows the setup for the MoCl 5 intercalation used in our study. 48) The sample was set in a glass capsule with MoCl 5 and MoO 3 .…”

Section: Intercalation Doping To Mlgmentioning

confidence: 99%

Advances in multilayer graphene processes for metallization and high-frequency devices

Ueno

2022

Jpn. J. Appl. Phys.

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Multilayer graphene (MLG) has been expected as an alternative material for nanometer wide interconnects. However, it has not been put into practical use, since the process technology that leads to practical use has been immature. Recent advances in the MLG processes and applications such as MLG capped copper interconnects, direct deposition of MLG by solid-phase deposition at a low-temperature, stable intercalation doping to MLG, and selective CVD of high crystallinity MLG for inductor and antenna applications are reviewed. According to these advances, MLG is considered to be approaching to the practical applications for device metallization and high frequency devices. Based on the characteristics of MLG as a conductor and recent development trends, the prospects and issues for future practical use of MLG graphene are discussed.

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MoCl₅intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene

Cited by 20 publications

References 32 publications

Transparent and Stretchable Graphene Electrode by Intercalation Doping for Epidermal Electrophysiology

Transparent and Stretchable Graphene Electrode by Intercalation Doping for Epidermal Electrophysiology

Multifunctional two-dimensional glassy graphene devices for vis-NIR photodetection and volatile organic compound sensing

Advances in multilayer graphene processes for metallization and high-frequency devices

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MoCl5intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene

Cited by 20 publications

References 32 publications

Transparent and Stretchable Graphene Electrode by Intercalation Doping for Epidermal Electrophysiology

Transparent and Stretchable Graphene Electrode by Intercalation Doping for Epidermal Electrophysiology

Multifunctional two-dimensional glassy graphene devices for vis-NIR photodetection and volatile organic compound sensing

Advances in multilayer graphene processes for metallization and high-frequency devices

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Product

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MoCl₅intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene