Mixed system and component level T-CAD for micro fabrication

Hansen, Ulli; Germer, C.; Büttgenbach, S.; Franke, Hans‐Joachim

doi:10.1109/dtip.2003.1286999

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“…As stated in earlier papers [3,4], the needed specifics can be obtained from a database. Briefly summarized, the data model allows for each fabrication step to hold information on the used technologies as well as the material and geometric properties of the micro device (prior and after the processing).…”

Section: Required Datamentioning

confidence: 99%

T-CAD for the analysis and verification of processing sequences

Hansen

Büttgenbach

2004

Microsystem Technologies

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This paper presents a rule-based software tool developed to assist with the definition and verification of processing sequences. Insight is given on the requirements needed to phrase the rules and how they can be classified. It is shown, how generics play an important role in order to increase the flexibility of the defined rules. The strategy which controls the execution of the rules is explained and the limitations of the concept are pointed out.The usage and usefulness of the presented software is illustrated by an example showing the fabrication of a micro coil.

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Section: Required Datamentioning

confidence: 99%