Mise en œuvre de deux méthodes interférométriques pour la caractérisation mécanique des films minces par l'essai de gonflement. Applications au cas du silicium monocristallin

Bonnotte, Éric; Delobelle, P.; Bornier, L.; Trolard, Bertrand; Tribillon, G.

doi:10.1051/jp3:1995169

Cited by 12 publications

(17 citation statements)

References 5 publications

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“…For a membrane or a plate clamped at its periphery, the differential pressure P diff and the maximum central deflection w 0 are related by the following formula (Bonnote et al 1995):…”

Section: Vacuum Measurement Principlementioning

confidence: 99%

“…C 1 , C 2 , C 3 are coefficients (2 < Ci £ 11) which depends on the membrane/plate shape (Bonnote et al 1995;Maier-Schneider et al 1995;Paviot et al 1995). C 2 depends as well on the Poisson ratio m and on b/a.…”

Section: Vacuum Measurement Principlementioning

confidence: 99%

“…C 2 depends as well on the Poisson ratio m and on b/a. In this paper computations were made with C 1 = 3.4075, C 2 = 1.84 and C 3 = 4.129 (case of a square membrane) (Bonnote et al 1995). The first term of Eq.…”

Section: Vacuum Measurement Principlementioning

confidence: 99%

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Vacuum measurement in wafer level encapsulations by interference microscopy

et al. 2006

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Vacuum encapsulation is required for various microsensors to improve their performances. In the case of wafer level vacuum encapsulation, dedicated techniques must be developed to measure the background pressure in the bonded cavities. In this paper we investigated ex situ measurement techniques based on the measurement by interference microscopy of the deformation and vibrations of the caps as function of an external pressure. Because these techniques detect the equality between external and internal pressure, they do not require any modelling nor prior calibration. Application to wafer level encapsulations fabricated by goldsilicon eutectic wafer bonding demonstrates that a detection limit in the 10 À2 -10 À1 mbar range can be reached for millimetre size caps.

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“…For a membrane or a plate clamped at its periphery, the differential pressure P diff and the maximum central deflection w 0 are related by the following formula (Bonnote et al 1995):…”

Section: Vacuum Measurement Principlementioning

confidence: 99%

Section: Vacuum Measurement Principlementioning

confidence: 99%

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Vacuum measurement in wafer level encapsulations by interference microscopy

et al. 2006

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“…These verifications were carried out by a bulging experiment which is described in ref. 12. The experiment consists to realize a fringe projection onto the membranes, first with no pressure applied, then with the application of a fixed pressure which produce the deformation.…”

Section: Principle Of Operationmentioning

confidence: 99%

<title>Micromachined pressure sensor integrated with an imbalanced Mach-Zehnder waveguide on silicon for coherence modulation scheme</title>

1998

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We investigate theoretically and experimentally the principle of a micromachined pressure sensor integrated in silicon. The optical part of the sensor consists of an imbalanced Mach-Zehnder waveguide interferometer. The waveguide is formed by a silicon nitride layer of high refractive index set between two cladding layers of silicon dioxide of lower refractive index. The sensing part of the device consists in a set of membranes obtained by anisotropic etching of the back face of the substrate under the reference arm. The pressure variations applied to the membrane induce a geometrical deformation of the waveguide arm and modify the optical path-difference between the arms. The non linear variation of the phase versus the applied pressure is obtained from the spectral analysis of the channeled spectrum transmitted by the interferometer. The static optical path-delay introduced between the arms allows the sensor to be introduced in a coherence modulation scheme, which can results in a remote sensor system, involving an active demodulation.

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“…Very few blister test experiments have yet been reported for thin inorganic films on inorganic substrates [6] although bulge test is used for a long time for such systems [7][8][9][10][11][12][13]. In [4].…”

Section: Sciences 1998mentioning

confidence: 99%