Minimization of Ga Induced FIB Damage Using Low Energy Clean-up

Thompson, Keith; Gorman, Brian P.; Larson, D.C.; Leer, Brandon Van; Liu, Hong

doi:10.1017/s1431927606065457

Cited by 93 publications

(56 citation statements)

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“…It is reasonable to assume that Ga ion implantation took place into the top surface of the cut area. For Ga ions at 30 keV, the implantation depth is 50 nm [40]. Still, the periodicity was clearly maintained even in the thin sections.…”

Section: Resultsmentioning

confidence: 93%

Top-down design of magnonic crystals from bottom-up magnetic nanoparticles through protein arrays

et al. 2017

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We show that chemical fixation enables top-down micro-machining of large periodic 3D arrays of protein-encapsulated magnetic nanoparticles (NPs) without loss of order. We machined 3D micro-cubes containing a superlattice of NPs by means of focused ion beam etching, integrated an individual micro-cube to a thin-film coplanar waveguide and measured the resonant microwave response. Our work represents a major step towards well-defined magnonic metamaterials created from the self-assembly of magnetic nanoparticles. Keywords: Self-assembly; magnetic nanoparticle; Ferritin; Chemical fixation; Ferromagnetic resonance; Magnonic metamaterial; Magnonics Magnonic crystals from protein array 2 IntroductionInorganic NPs coated with surfactants can self-assemble via hydrophilic or hydrophobic interactions to form regular 2D or 3D structures (colloidal crystals) [1][2][3][4][5][6][7][8] and NPs coated with biological molecules, DNA or proteins can also form highly ordered structures with tunable lattice parameters. [9,10] Many potential applications for such materials require their patterning into well-defined shapes and the exact positioning of the self-assembled superlattices. For example, thin sections of semiconductor colloidal crystals would be useful for electronic devices exploiting the charge storage capacity of the NPs[11] and shaped arrays of metal NPs for plasmonic devices. [12] To develop integrated devices containing functional NPs periodically arranged in three dimensions, it is necessary to fabricate samples of the self-assembled 3D NPs arrays with welldefined geometries, often with flat surfaces, to precisely generate and analyze electric and magnetic properties. This is in particular true for superlattices consisting of ordered magnetic particles. Here, the long-range magnetic stray fields and demagnetization effect depend critically on the surfaces and alter the internal magnetic field. The internal magnetic field rules the microwave response and spin-wave (magnon) modes [13] which are of relevance in very different fields ranging from biomedicine[14] to microwave devices [15] and magnonics [16]. Non-flat or irregular surfaces do not allow one to precisely determine the demagnetization factors necessary for a detailed data analysis. At the same time three-dimensionally arranged nanoparticles are expected to exhibit lattice-induced anisotropic properties that might be compromised by irregular shapes. Therefore, a method to machine an exact shape and size with well-defined surfaces is indispensable for device development and applications while still keeping the periodicity of the NPs. Also precise positioning of the machined structure is of utmost importance.Thin sections of magnetic NPs are of special interest for their magnetotransport properties[17] and for use in magnetic devices operated at microwave frequencies. [14][15][16] Often, randomly oriented magnetic NPs have been addressed. [14,15,18] In the research field of magnonics, however, strictly periodic magnetic nanostructures that form artifici...

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Section: Resultsmentioning

confidence: 93%

Top-down design of magnonic crystals from bottom-up magnetic nanoparticles through protein arrays

et al. 2017

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“…The specimens were extracted from the surface of the bulk material by standard FIB lift-out procedures, deposited on a commercial Si tip array and then sharpened to tip radii of <100 nm, followed by a cleaning procedure as described by Thompson [30] and analyzed by APT. APT characterization was conducted on a LEAP 3000X HR instrument (Cameca), at a base temperature of 70 ± 4 K, operated in laser-pulsed mode (wavelength 532 nm; pulse repetition rate: 200 kHz) with 0.2 nJ pulse energy in a voltage range starting from 4 kV.…”

Section: Methodsmentioning

confidence: 99%

Autonomous Repair Mechanism of Creep Damage in Fe-Au and Fe-Au-B-N Alloys

Zhang

Kwakernaak

Tichelaar

et al. 2015

Metall Mater Trans A

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The autonomous repair mechanism of creep cavitation during high-temperature deformation has been investigated in Fe-Au and Fe-Au-B-N alloys. Combined electron-microscopy techniques and atom probe tomography reveal how the improved creep properties result from Au precipitation within the creep cavities, preferentially formed on grain boundaries oriented perpendicular to the applied stress. The selective precipitation of Au atoms at the free creep cavity surface results in pore filling, and thereby, autonomous repair of the creep damage. The large difference in atomic size between the Au and Fe strongly hampers the nucleation of precipitates in the matrix. As a result, the matrix acts as a reservoir for the supersaturated solute until damage occurs. Grain boundaries and dislocations are found to act as fast transport routes for solute gold from the matrix to the creep cavities. The mechanism responsible for the self-healing can be characterized by a simple model for cavity growth and cavity filling.

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“…This quantification is possible due to the final 2 kV final cleaning of lamella to minimize the incorporation of gallium to side wells. The literature data concerning simulations of Ga atoms implantation shows that during FIB cleaning at 5 kV, the penetration depth into silicon is about 4 nm, with maximum atomic concentration of 2 at.% [11,12]. Thus, in the case of performing 2 kV final cleaning, implantation of gallium can be neglected for EDS quantification when 30-50 nm lamella is used.…”

Section: Nw Cross-section By Fib Sectioning Methodsmentioning

confidence: 99%

FIB Method of Sectioning of III-V Core-Multi-Shell Nanowires for Analysis of Core/Sell Interfaces by High Resolution TEM

et al. 2017

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The core-multishell wurtzite structure (In,Ga)As-(Ga,Al)As-(Ga,Mn)As semiconductor nanowires have been successfully grown on GaAs(111)B substrates using MBE technique. The nanowires cores were grown with gold eutectic catalyser in vapour-liquid-solid growth mode. The double shell overgrowth, on the side facets of nanowires, was performed using lower substrate temperature (about 400• C, and 230• C, for (Ga,Al)As, and (Ga,Mn)As shell growth, respectively). The polytypic ordering, defects, chemistry and geometric perfection of the core and the shells have been analysed at atomic level by advanced transmission electron microscope techniques with the use of axial and longitudinal section of individual nanowires prepared by focused ion beam. High quality cross-sections suitable for quantitative transmission electron microscope analysis have been obtained and enabled analysis of interfaces between the core and the shells with near atomic resolution. All investigated shells are epitaxial without misfit dislocations at the interface. Some of the shells thicknesses are not symmetric, which is due to the shadowing effects of neighbouring nanowires and directional character of the elemental fluxes in the MBE growth process.

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Minimization of Ga Induced FIB Damage Using Low Energy Clean-up

Abstract: Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Cited by 93 publications

References 0 publications

Top-down design of magnonic crystals from bottom-up magnetic nanoparticles through protein arrays

Top-down design of magnonic crystals from bottom-up magnetic nanoparticles through protein arrays

Autonomous Repair Mechanism of Creep Damage in Fe-Au and Fe-Au-B-N Alloys

FIB Method of Sectioning of III-V Core-Multi-Shell Nanowires for Analysis of Core/Sell Interfaces by High Resolution TEM

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