2005
DOI: 10.1117/12.616779
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Miniaturized optical module for projection of arbitrary images based on two-dimensional resonant micro scanning mirrors

Abstract: This contribution presents an optical module for projection of still images and video sequences. It consists of a laser source, miniature collimator optics, and a special MEMS device, a two-dimensional resonant micro scanning mirror. The laser beam is focused onto the micro mirror by the collimator optics. The micro mirror reflects the beam onto the desired projection area with a flare angle of up to 15 degrees for both axes. Given the resonant oscillation of the mirror, the beam follows a Lissajous figure. By… Show more

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Cited by 11 publications
(5 citation statements)
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“…In general, lasers with increased optical power are needed to achieve bright images even under unfavorable conditions. This requires the replacement of the aluminum on top of the mirror by dielectric coatings with reflecting coefficients near to 100% [14]. Last but not least, miniaturized solutions for speckle reduction have to be integrated into the projection systems.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…In general, lasers with increased optical power are needed to achieve bright images even under unfavorable conditions. This requires the replacement of the aluminum on top of the mirror by dielectric coatings with reflecting coefficients near to 100% [14]. Last but not least, miniaturized solutions for speckle reduction have to be integrated into the projection systems.…”
Section: Discussionmentioning
confidence: 99%
“…In the left part of Figure 7, the projection module used for full color images [14] is shown. It has a size of 23 x 23 x 27,5mm 3 and contains the micro scanning mirror (seen through the glass window) and some micro optics for collimation of the laser beam.…”
Section: System Realizationmentioning
confidence: 99%
“…They either require complex optical (LCoS [5]) or mechanical (polygon wheels) systems, are bulky by nature (galvo scanners), or require driving voltages above 1000V for large deflection angles (other Micro scanners). A more detailed analysis can be found in [6]. In summary, the scanning mirror developed by Fraunhofer IPMS is an almost ideal choice for miniaturized projection systems.…”
Section: Basic Principles Of Image Display and System Architecturementioning
confidence: 99%
“…Micromirror-based laser scanning technology has drawn the attention of many researchers for a variety of applications, especially for display systems. The ability of a single MEMS micromirror to deflect a laser with a large angle at high frequency makes it possible to create displays with high brightness and resolution [ 1 , 2 , 3 , 4 ]. The benefit of the use of MEMS micromirrors is that they will greatly reduce the volume and power of a system.…”
Section: Introductionmentioning
confidence: 99%