No abstract

A micro scanning mirror is an optical device used to scan laser beams which can be used for Light Detection and Ranging (LiDAR) in applications like unmanned driving or Unmanned Aerial Vehicle (UAV). The MEMS scanning mirror’s light-weight and low-power make it a useful device in LiDAR applications. However, the MEMS scanning mirror’s small aperture limits its application because it is too small to deflect faint receiving light. In this paper, we present a Ti-alloy-based electromagnetic micro scanning mirror with very large-aperture (12 mm) and rapid scanning frequency (1.24 kHz). The size of micro-scanner’s mirror plate reached 12 mm, which is much larger than familiar MEMS scanning mirror. The scanner is designed using MEMS design method and fabricated by electro-sparking manufacture method. As the experimental results show, the resonant frequency of the micro scanning mirror is 1240 Hz and the optical scanning angle can reach 26 degrees at resonance frequency when the actuation current is 250 mApp.

No abstract

Lissajous microscanners are very popular in compact laser-scanning applications, such as solid-state light detection and ranging (LIDAR), owing to their high-quality factor and low power consumption. In the Lissajous scanner driven by a two-axis micro-electro-mechanical system scanning mirror (MEMS-SM), the design theory is insufficient to meet the temporal and spatial resolution at the same time. In this paper, the greatest common divisor of the two-axis driving frequency is used as the temporal resolution, the concept of the fill factor (FF) is used to describe the spatial resolution of the scanner, and a general algorithm for calculating the FF is presented. Combined with the characteristics of the Lissajous trajectory, three design rules of the general Lissajous scanner are proposed, and the design theory of the Lissajous scanner enabling MEMS LIDAR is perfected. Experimental results show that the proposed design rules can effectively meet the LIDAR design requirements.

No abstract