Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance

Hùng, Vũ Ngọc; Abe, Takashi; Minh, Phan Ngoc; Esashi, Masayoshi

doi:10.1063/1.1532750

Cited by 39 publications

(12 citation statements)

References 11 publications

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“…Through the years, several MQCMs have been developed for advanced sensing applications, including electronic nose, electronic tongue, and biosensor arrays [ 8 , 9 , 10 , 11 , 12 , 13 , 14 ]. The use of MQCM technology leads to relevant benefits including multi-analysis capabilities, lower cost per sensor unit, less sample/reagent consumption, faster sensing response, and shorter detection assay time.…”

Section: Introductionmentioning

confidence: 99%

Design and Validation of a 150 MHz HFFQCM Sensor for Bio-Sensing Applications

Fernandez¹,

Bou-Belda²,

García³

et al. 2017

Sensors

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Acoustic wave resonators have become suitable devices for a broad range of sensing applications due to their sensitivity, low cost, and integration capability, which are all factors that meet the requirements for the resonators to be used as sensing elements for portable point of care (PoC) platforms. In this work, the design, characterization, and validation of a 150 MHz high fundamental frequency quartz crystal microbalance (HFF-QCM) sensor for bio-sensing applications are introduced. Finite element method (FEM) simulations of the proposed design are in good agreement with the electrical characterization of the manufactured resonators. The sensor is also validated for bio-sensing applications. For this purpose, a specific sensor cell was designed and manufactured that addresses the critical requirements associated with this type of sensor and application. Due to the small sensing area and the sensor’s fragility, these requirements include a low-volume flow chamber in the nanoliter range, and a system approach that provides the appropriate pressure control for assuring liquid confinement while maintaining the integrity of the sensor with a good base line stability and easy sensor replacement. The sensor characteristics make it suitable for consideration as the elemental part of a sensor matrix in a multichannel platform for point of care applications.

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Section: Introductionmentioning

confidence: 99%

Design and Validation of a 150 MHz HFFQCM Sensor for Bio-Sensing Applications

Fernandez¹,

Bou-Belda²,

García³

et al. 2017

Sensors

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“…If many sensing elements are involved (as in an array [71,72]), the individual elements must be small. Fabrication may be a problem for small devices.…”

Section: Smaller and Better?mentioning

confidence: 99%

Other Surface-Acoustic-Wave Based Instruments

Johannsmann

2014

The Quartz Crystal Microbalance in Soft Matter Research

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There is a variety of sensing instruments making use of acoustic waves (often shear waves) near interfaces. Among the concepts shared between the QCM and these instruments are the mass sensitivity and the acoustic reflectivity as a central intermediate parameter. The kHz resonators measure viscoelastic parameters at frequencies more relevant to most applications than MHz frequencies. On the other hand, they are less sensitive. Smaller resonators operating at higher frequencies tend to have better mass-sensitivity. Shear-Wave ReflectometersThe shear-wave reflectometer dates from the time when acoustic sensing started. It has seen numerous developments and extensions since then. Figure 15

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“…There are many versions of them from which one would set off sensors using piezoelectric longitudinal field excited resonators [4] and delay lines on surface waves or Lamb waves [5,6] contacting with the gas-sensitive film. Piezoelectric lateral electric field excited resonators attract particular interest of engineers dealing with development of acoustical gas sensors in recent decade.…”

Section: Introductionmentioning

confidence: 99%