Array of piezoelectric lateral electric field excited resonators

Бородина, И. А.; Зайцев, Б. Д.; Teplykh, А. Е.; Shikhabudinov, A. M.; Kuznetsova, I. E.

doi:10.1016/j.ultras.2015.05.018

Cited by 6 publications

(4 citation statements)

References 8 publications

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“…coefficient, the frequency stability and sensitivity of LFE sensors based on quartz crystals are not enough [16]. Monoclinic YCa4O(BO3)3 (YCOB) crystals do not have any phase transition below 1000 °C.…”

Section: Governing Equationsmentioning

confidence: 99%

“…However, when the temperature exceeds 300 • C, the devices fail to work due to the phase transition of quartz crystals. Besides, due to the low piezoelectric coupling coefficient, the frequency stability and sensitivity of LFE sensors based on quartz crystals are not enough [16]. Monoclinic YCa 4 O(BO 3 ) 3 (YCOB) crystals do not Crystals 2022, 12, 542 2 of 15 have any phase transition below 1000 • C. Moreover, below 800 • C, it has a high resistivity of 2 × 10 8 Ohm • cm [17].…”

Section: Introductionmentioning

confidence: 99%

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Resonance Analysis of Piezoelectric Bulk Acoustic Wave Devices Based on YCOB Crystals with Monoclinic Symmetry Excited by Lateral Electric Fields

et al. 2022

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The monoclinic YCOB crystal still maintains good piezoelectric properties at 800 °C; thus, it has a good application prospect in high-temperature piezoelectric acoustic wave sensors. However, due to the lower symmetry compared crystals in trigonal and tetragonal systems, the exciting characteristics of piezoelectric plates based on monoclinic YCOB crystals are more complicated. The vibration analysis model of lateral-field-excitation (LFE) devices based on monoclinic crystals is scarce; thus, the coupling relationships between different vibration modes and energy-trapping characteristics of the devices are unclear, which hinders the optimal design of devices. In this paper, by using Mindlin plate theory, the high-frequency vibrations of piezoelectric resonators based on monoclinic YCOB crystal plates excited by a lateral electric field are modeled and analyzed. The coupling relationships between the vibration modes of the device are clarified. The influences of the electrode width, electrode/plate mass ratio and electrode gap value on resonances and energy-trapping characteristics of the device are achieved. In addition, the effects of the structure parameters on the mass sensitivity of the monoclinic YCOB LFE devices are investigated, which are further verified by FEM simulations. The results are crucial to obtaining good resonance and sensing characteristics for LFE high-temperature piezoelectric sensors based on crystals with monoclinic symmetry.

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Section: Governing Equationsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Resonance Analysis of Piezoelectric Bulk Acoustic Wave Devices Based on YCOB Crystals with Monoclinic Symmetry Excited by Lateral Electric Fields

et al. 2022

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“…Substituting equation (19) into equation (6) results in three linear equations for A A . -For nontrivial solutions, the coefficient matrix determinant has to vanish, which yields a polynomial equation of degree three for x .…”

Section: Central Unelectroded Area With 0<x 1 mentioning

confidence: 99%

“…The lateral electric field in [17] was produced by a pair of side electrodes at the plate edges which is not realistic because the crystal plates are very thin. In real devices, the lateral electric field is produced by a pair of electrodes at the plate top (or bottom) surface [18][19][20].…”

Section: Introductionmentioning

confidence: 99%

High-frequency vibration analysis of LiTaO₃ piezoelectric plates excited by lateral electric fields produced by surface electrodes under viscous liquid loadings for sensing

Wang¹,

Shi²,

Ma³

et al. 2020

Smart Mater. Struct.

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In this work, the coupled thickness-shear and flexural vibrations of the LiTaO 3 piezoelectric plates excited by lateral electric fields produced by surface electrodes under viscous liquid loadings are modeled and analyzed based on Mindlin's plate theory. The influences of liquid properties on the admittance characteristics and frequency shifts of the piezoelectric bulk acoustic wave devices operate in the lateral field excitation (LFE) mode are examined. In addition, the effects of the structure parameters, such as the electrode gap width, electrode/plate mass ratio and the electrode width, on the frequency sensitivity are investigated. It is shown that with the increasing electrode/plate mass ratio R, the sensitivities of the device on liquid viscosity and density increase first and then decrease, there is a maximal sensitivity when R is with a certain value. The varying trends of the frequency shifts with various liquid properties and sensitivities with various structural parameters are verified by the FEM simulations. The results are crucial to obtain good vibration characteristics and sensitivities for liquid-phase LFE piezoelectric sensors by using LiTaO 3 piezoelectric crystals.

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The influence of the conducting film on the characteristics of the lateral electric field excited piezoelectric resonator

et al. 2018

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Array of piezoelectric lateral electric field excited resonators

Cited by 6 publications

References 8 publications

Resonance Analysis of Piezoelectric Bulk Acoustic Wave Devices Based on YCOB Crystals with Monoclinic Symmetry Excited by Lateral Electric Fields

Resonance Analysis of Piezoelectric Bulk Acoustic Wave Devices Based on YCOB Crystals with Monoclinic Symmetry Excited by Lateral Electric Fields

High-frequency vibration analysis of LiTaO₃ piezoelectric plates excited by lateral electric fields produced by surface electrodes under viscous liquid loadings for sensing

The influence of the conducting film on the characteristics of the lateral electric field excited piezoelectric resonator

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Array of piezoelectric lateral electric field excited resonators

Cited by 6 publications

References 8 publications

Resonance Analysis of Piezoelectric Bulk Acoustic Wave Devices Based on YCOB Crystals with Monoclinic Symmetry Excited by Lateral Electric Fields

Resonance Analysis of Piezoelectric Bulk Acoustic Wave Devices Based on YCOB Crystals with Monoclinic Symmetry Excited by Lateral Electric Fields

High-frequency vibration analysis of LiTaO3 piezoelectric plates excited by lateral electric fields produced by surface electrodes under viscous liquid loadings for sensing

The influence of the conducting film on the characteristics of the lateral electric field excited piezoelectric resonator

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High-frequency vibration analysis of LiTaO₃ piezoelectric plates excited by lateral electric fields produced by surface electrodes under viscous liquid loadings for sensing