2022
DOI: 10.3390/s22134735
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Miniaturization of Laser Doppler Vibrometers—A Review

Abstract: Laser Doppler vibrometry (LDV) is a non-contact vibration measurement technique based on the Doppler effect of the reflected laser beam. Thanks to its feature of high resolution and flexibility, LDV has been used in many different fields today. The miniaturization of the LDV systems is one important development direction for the current LDV systems that can enable many new applications. In this paper, we will review the state-of-the-art method on LDV miniaturization. Systems based on three miniaturization tech… Show more

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Cited by 19 publications
(8 citation statements)
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“…The Doppler frequency shift of the reflected light, which is proportional to the instantaneous velocity of the DUT, can be retrieved from the combined signals with proper demodulation algorithms. Generally, heterodyne methods and homodyne methods [7] can be used. In the on-chip LDV, we are using a homodyne method because of the lack of an efficient frequency shifter on the chip.…”
Section: System Design and Measurement Setupmentioning
confidence: 99%
“…The Doppler frequency shift of the reflected light, which is proportional to the instantaneous velocity of the DUT, can be retrieved from the combined signals with proper demodulation algorithms. Generally, heterodyne methods and homodyne methods [7] can be used. In the on-chip LDV, we are using a homodyne method because of the lack of an efficient frequency shifter on the chip.…”
Section: System Design and Measurement Setupmentioning
confidence: 99%
“…Laser Doppler vibrometers (LDVs) have also been used to detect photoacoustic signals. [12][13][14] These systems are typically based on free-space or fiber optics, which can be expensive and bulky. In this work, we present a photonic integrated circuit (PIC)-based homodyne LDV for compact, optical-based detection of photoacoustic signals.…”
Section: Introductionmentioning
confidence: 99%
“…[18] It allows high frequency (up to GHz), high sensitivity (accuracy down to picometer), and fast speed 3D mapping in real-time, which has been employed in a wide field, such as ve- locity monitoring and ultrasound mapping. However, it requires specialized and often costly equipment, and the miniaturization of such techniques [19] and the line-of-sight [20] limit in free-space optics remain challenging for wider biomedical applications. Efficient fabrication of free-standing ME membranes with tailorable size is another problem to be addressed for the purpose of integration with sophisticated devices of various geometries.…”
Section: Introductionmentioning
confidence: 99%