2018
DOI: 10.1088/1752-7163/aad384
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Miniaturization of breath sampling with silicon chip: application to volatile tobacco markers tracking

Abstract: This work presents the performances of silicon micro-preconcentrators chips for breath sampling. The silicon chips were coupled to a handheld battery powered system for breath sampling and direct injection in a laboratory gas chromatography mass spectrometry system through thermal desorption (TD). Performances of micro-preconcentrators were first compared to commercial TD for benzene trapping. Similar chromatographic peaks after gas chromatographic separation were observed while the volume of sample needed was… Show more

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Cited by 6 publications
(10 citation statements)
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“…In the last decades, MEMS technology has been widely used for the fabrication of PCs [1,5,20,26,27,[33][34][35][36][37][38][39][40]; therefore, most of these devices are made of materials related to the electronics industry. So far, silicon has been the most employed material due to its relatively high thermal conductivity and the variety of existing micromachining techniques.…”
Section: Siliconmentioning
confidence: 99%
See 4 more Smart Citations
“…In the last decades, MEMS technology has been widely used for the fabrication of PCs [1,5,20,26,27,[33][34][35][36][37][38][39][40]; therefore, most of these devices are made of materials related to the electronics industry. So far, silicon has been the most employed material due to its relatively high thermal conductivity and the variety of existing micromachining techniques.…”
Section: Siliconmentioning
confidence: 99%
“…Once the cavities are etched, the substrate is bonded to another plate usually made of glass resulting in a sealed chip. Anodic bonding is the most common technique for silicon-glass bonding [6][7][8]19,34,36,37,[51][52][53]. In this process, a DC voltage ranging from 500 to 2000 V is applied between the substrates whereas they are heated to temperatures varying from 300 to 600 °C [48].…”
Section: Siliconmentioning
confidence: 99%
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