Miniature Robots for Ultra Precision Measurement and Machining

Aoyama, Hisayuki; Nakano, Hiroyuki; Hayakawa, Naoya; Sasaki, Akira; Shimokohbe, Akira

doi:10.1016/b978-0-7506-9484-1.50033-6

Cited by 10 publications

(2 citation statements)

References 11 publications

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“…Thus, equipment accuracy increases linearly with decreasing equipment size, and its relative precision remains constant. Therefore we conclude that to avoid problems of making ultraprecision macroequipment, it is expedient to fabricate microparts using microequipment with dimensions commensurable with those of machined parts (see also [33,27]).…”

Section: Enhancement Of Equipment Precision Due To Downsizingmentioning

confidence: 99%

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Micromechanical engineering: a basis for the low-cost manufacturing of mechanical microdevices using microequipment

Kussul

Rachkovskij

Baidyk

et al. 1996

J. Micromech. Microeng.

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Microelectronics-based micromechanics is rather limited for the construction of 3D micromechanisms with moving parts. We propose to use microequipment to transfer the technologies of mechanical engineering to the microdomain. We show that equipment precision increases linearly with decreasing size. To make microequipment, we suggest a series of equipment generations with gradually decreasing dimensions. Miniaturization of equipment will reduce power consumption and floor area occupied. Coupled with automation, it will drastically reduce the cost of microequipment. This in its turn will reduce the cost of micromechanical devices manufactured by microequipment. Microequipment-based manufacturing will also increase throughput by the concurrent operation of large numbers of low-cost microequipment pieces. The low cost and high productivity of microequipment-based manufacturing will widen the range of feasible micromechanical applications, both single-unit and mass. We propose designs for microvalve fluid filters, capillary heat exchangers, electromagnetic and hydraulic step motors that could be easily implemented by micromechanical engineering technologies. Hybrid technologies combining massively parallel microequipment based manufacturing and batch manufacturing may also be promising.

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Section: Enhancement Of Equipment Precision Due To Downsizingmentioning

confidence: 99%

“…The use of mechanical engineering technologies to make micro machinery [28][29][30][31][32][33] raises a number of issues that are still unclear. These issues concern the limits of mechanical machining, ways of achieving them, the cost and throughput of equipment, and the range and cost of potential applications.…”

Section: Introductionmentioning

confidence: 99%