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2019
DOI: 10.1016/j.sna.2019.03.036
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Miniature pressure sensor based on suspended MWCNT

Abstract: Highlights   We present a sensitive miniature pressure sensor based on the change in the physisorbed gases with the pressure of the surrounding air.  The sensor consists of a suspended individual multiwall carbon nanotube (MWCNT) clamped on Au electrodes by electron beam-induced deposition (EBID) of Pt. The variation in the surrounding pressure is shown to be tracked by monitoring the change in the resistivity, hence resistance, of the MWCNT bridge structure due to the change in percentage of oxygen and … Show more

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Cited by 6 publications
(4 citation statements)
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References 32 publications
(55 reference statements)
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“…Thereby, combining (8), (10), and (16), the exact solution of the equilibrium equation in (5) has the following form:…”
Section: Original Shapementioning
confidence: 99%
See 1 more Smart Citation
“…Thereby, combining (8), (10), and (16), the exact solution of the equilibrium equation in (5) has the following form:…”
Section: Original Shapementioning
confidence: 99%
“…Bistable beams exhibit additional advantages, such as their simplicity, passive holding, low actuation energy, small footprint, large stroke with small restoring forces, and negative stiffness zone. These advantages make bistable beams suitable for an increasing number of applications at different scales, such as space applications [1], biomedical [2], energy harvesting [3,4], resonators [5], actuators [6] accelerometers [7], shock sensors [8], gas sensors [9], pressure sensors [10], flow sensors [11], grippers [12], mechanisms with large displacement and small actuation stroke [13], switches [14], relays [15], memory devices [16], logics [17], lamina emergent frustrum [18], statically-balanced mechanisms [19], soft robotics [20], constant force mechanisms [21,22], bistable positioning [23][24][25][26], and multistable devices [27][28][29][30][31][32].…”
Section: Introductionmentioning
confidence: 99%
“…The study points out to understand the resistance changes due to the physical strain of the MWCNTs, analyzing their electrical conductivity subjecting the layer to increasing loads and load/unload cycles [82]. The pure MWCNTs resistivity was 0.084 ± 0.003 Ω•cm, whereas for oxidized ones was 0.156 ± 0.003 Ω•cm with a porosity of 0.67 and 0.56, respectively [83]. The formation of oxygenated functional groups during oxidation induced an increase in contact resistance in carbon nanotube (CNT) junctions [84].…”
Section: Overview Of Smart Piezoresistive Textiles and Materials Used To Monitor Respiration Ratementioning
confidence: 99%
“…Buckled and pre-shaped beams are widely used as bistable mechanisms at the small and large scale [1]. These mechanisms are employed in various applications in many sectors, including soft robotics [2], metamaterials [3], multistable positioning [4,5], resonators [6,7], actuators [8], gas sensing [9], pressure sensing [10], threshold sensing [11,12], logics [13], space applications [14], biomedical [15], and energy harvesting [16,17].…”
Section: Introductionmentioning
confidence: 99%