MOEMS and Miniaturized Systems XVIII 2019
DOI: 10.1117/12.2506366
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Miniature MOEMS hyperspectral imager with versatile analysis tools

Abstract: The Fabry-Perot interferometers (FPI) are essential components of many hyperspectral imagers (HSI). While the Piezo-FPI (PFPI) are still very relevant in low volume, high performance applications, the tunable MOEMS FPI (MFPI) technology enables volume-scalable manufacturing, thus having potential to be a major game changer with the advantages of low costs and miniaturization. However, before a FPI can be utilized, it must be integrated with matching optical assembly, driving electronics and imaging sensor. Mos… Show more

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Cited by 5 publications
(8 citation statements)
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“…The imager is connected to a computer via Cube View software [ 24 ] (University of Jyväskylä, Spectral Imaging Laboratory [ 25 ]). The software is pre-set to capture 33 wavebands with wavelengths from visible to near infrared light (477–891 nm) [ 18 ].…”
Section: Methodsmentioning
confidence: 99%
“…The imager is connected to a computer via Cube View software [ 24 ] (University of Jyväskylä, Spectral Imaging Laboratory [ 25 ]). The software is pre-set to capture 33 wavebands with wavelengths from visible to near infrared light (477–891 nm) [ 18 ].…”
Section: Methodsmentioning
confidence: 99%
“…This can be accomplished using either piezo-actuators or electrostatic actuators. 183 According to Trops et al., 183 piezo-actuators FPI had larger optical apertures and higher SNR, and electrostatic actuators were mass-producible, have smaller optical apertures, and lower SNR. In terms of spectral ranges, piezo-actuated MEMS FPI have a wider tuning range compared with electrostatic actuated MEMS FPI.…”
Section: Technical Aspects Of Compact Spectral Camerasmentioning
confidence: 99%
“… 178 In spectral imagers, this is most applicable to MEMS-enabled FPI imagers, where the air gap between the mirrors cannot be smaller than two-thirds of the initial unactuated air gap size to avoid pull-in phenomena. 159 , 183 , 188 …”
Section: Technical Aspects Of Compact Spectral Camerasmentioning
confidence: 99%
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“…The HS images were captured by dermatologists and nurses (users). The SICSURFIS HSI was combined with a specially designed hospital version of the CubeView software [25]. CubeView is a spectral imaging and analysis software developed by the spectral imaging laboratory of the University of Jyväskylä, Finland [26].…”
Section: Clinical Pre-test Instrumentationmentioning
confidence: 99%