Miniature fuel cell with conductive silicon electrodes

Onoe, Shinsuke; Tanaka, Hiroto; Hoshino, Kazunori; Matsumoto, Keiji; Shimoyama, Isao

doi:10.1109/sensor.2005.1497317

Cited by 8 publications

(4 citation statements)

References 7 publications

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“…The performance test that was performed for the cell produced a maximum performance of 1.86 mW/cm 2 at a voltage of 138.7 mV. A performance comparison study was conducted between the results of this work and a previous work by Onoe et al [15], as shown in Table 4. This study was performed is because their work used an anode electrode structure that incorporated a porous design (passive) and serpentine design (active).…”

Section: Resultsmentioning

confidence: 91%

Nd:YAG LASER FABRICATION OF SILICON ELECTRODE PLATES FOR A COMBINED-MODE MICRO DIRECT METHANOL FUEL CELL

2019

MJAS

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A silicon wafer was microfabricated to produce a new combined-mode flow field for the purpose of distributing methanol fuel throughout the anode side of a micro direct methanol fuel cell (DMFC). Active mode of operation, which generally produces more power, is more suited to higher power requirements compared with the passive mode. Different power outputs using different modes may be required during cell operation by devices that can potentially use the micro DMFC. The new flow field design in the electrode structure of the micro DMFC must manage the methanol fuel transport in either active or passive mode. The flow field area was designed to obtain 50% of the 1 cm 2 active reaction area of the membrane electrode assembly. The proposed design was simulated using COMSOL multi-physics software and microfabricated by incorporating two flow field designs on the anode plate, namely, the grid flow field for the active mode and the porous flow field for the passive mode. The silicon wafer used to produce the electrode plate was a <100> p-type single-sided polished substrate and the MEMS-based microfabrication process to form the required electrode structures was dry etching with laser ablation. The current collector layers used were titanium/copper with a thickness of 1.1 μm and gold with a thickness of 0.18 µm. The completed single-cell micro DMFC obtained a maximum performance of 1.86 mW/cm 2 at a voltage of 138.7 mV.

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Section: Resultsmentioning

confidence: 91%

Nd:YAG LASER FABRICATION OF SILICON ELECTRODE PLATES FOR A COMBINED-MODE MICRO DIRECT METHANOL FUEL CELL

2019

MJAS

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“…The unmodified micro DMFC had poor performance in this work but it was still within the literature range of the MEMS-based micro DMFC with planar electrode and similar catalyst loading. For example, Onoe et al [12] reported a MEMS-based micro DMFC with an OCV of 0.15 V and a MPD of 16 W/cm 2 using pure Pt catalyst and 1 M methanol solution feeds. Sim et al [13] fabricated a microfabricated micro DMFC with the OCV of 0.1 V. Seo et al [14] demonstrated that the MPD of ~ 5.6 W/cm 2 and the OCV of ~ 0.33 V were achieved for their MEMS-based micro DMFC with planar electrode.…”

Section: Resultsmentioning

confidence: 99%

Nanoimprint of Polymer Electrolyte Membrane for Micro Direct Methanol Fuel Cell Application

Zhang¹,

Lü²,

Wang³

et al. 2009

ECS Trans.

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This paper reviews current progress on the miniaturization of direct methanol fuel cell (DMFC) by micro-electro-mechanical systems (MEMS) technology. MEMS-based micro DMFC has low performance because of low catalyst efficiency. Thermal nanoimprint technology is presented as an attractive method for achieving high catalyst efficiency. Fine patterns were directly formed on Nafion 117 membrane by using thermal nanoimprint method. With passive feeding of 1 M methanol solution and air, the nanoimprinted micro DMFC prototype had a open circuit voltage (OCV) of about 0.74 V and a maximum power density (MPD) of 0.2 mW/cm 2 , which were much higher than those of the state-of-the-art MEMS-based micro DMFC with similar catalyst loading, suggesting that much higher catalyst efficiency had been realized. This conclusion was also supported by the fuel cell experiments on the nanoimprinted membrane using humidified hydrogen and oxygen at 60 o C.

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“…The same cells were also characterized using 8 M methanol solution. [1][2][3][4]. Cell A also showed higher OCV than the state-of-the-art of µDMFC with porous electrode, suggesting that there was better three-phase reaction contact.…”

Section: Transducers and Eurosensors '07mentioning

confidence: 99%

“…For example, the state-of-the-art MEMS-based DMFC with planar electrode has the OCV of 0.1 ~ 0.33 V and the MPD of about 0.016 mW/cm 2[2]. Much of recent effort has been devoted to improving the performance of the MEMS-based µDMFC[2][3][4][5][6].…”

mentioning

confidence: 99%

Nanoimprint Fuel Cell for On-Chip Power Application

Zhang

Zhou

et al. 2007

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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MEMS-based micro direct methanol fuel cells (µDMFCs) have poor performance because polymer electrolyte membrane fuel cell (PEMFC) is not well compatible with MEMS process. In this work, fine pattern was formed on PEM using nanoimprint technology. Using the nanoimprint PEM, a MEMS-based µDMFC was fabricated. The MEMS-based µDMFC had the open circuit voltage (OCV) of 0.74 V and the maximum power density (MPD) of 0.2 mW/cm 2 , which were higher by about 2~7 and 10 times, respectively, than those of the state-of-the-art MEMS-based µDMFC with planar electrode. It demonstrated that the nanoimprint technology could help us to integrate PEMFC and MEMS technology into on-chip power application.

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Miniature fuel cell with conductive silicon electrodes

Cited by 8 publications

References 7 publications

Nd:YAG LASER FABRICATION OF SILICON ELECTRODE PLATES FOR A COMBINED-MODE MICRO DIRECT METHANOL FUEL CELL

Nd:YAG LASER FABRICATION OF SILICON ELECTRODE PLATES FOR A COMBINED-MODE MICRO DIRECT METHANOL FUEL CELL

Nanoimprint of Polymer Electrolyte Membrane for Micro Direct Methanol Fuel Cell Application

Nanoimprint Fuel Cell for On-Chip Power Application

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