TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference 2007
DOI: 10.1109/sensor.2007.4300281
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Nanoimprint Fuel Cell for On-Chip Power Application

Abstract: MEMS-based micro direct methanol fuel cells (µDMFCs) have poor performance because polymer electrolyte membrane fuel cell (PEMFC) is not well compatible with MEMS process. In this work, fine pattern was formed on PEM using nanoimprint technology. Using the nanoimprint PEM, a MEMS-based µDMFC was fabricated. The MEMS-based µDMFC had the open circuit voltage (OCV) of 0.74 V and the maximum power density (MPD) of 0.2 mW/cm 2 , which were higher by about 2~7 and 10 times, respectively, than those of the state-of-t… Show more

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“…Recently, we have introduced nanoimprint technology into passive micro DMFC application [11]. A passive micro DMFC is more attractive for practical application because it has a simple structure.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, we have introduced nanoimprint technology into passive micro DMFC application [11]. A passive micro DMFC is more attractive for practical application because it has a simple structure.…”
Section: Introductionmentioning
confidence: 99%