Miniature fiber pressure sensor based on an in-fiber confocal cavity

Wang, Tingting; Ge, Yixian; Ni, Haibin; Chang, Jianhua; Zhang, Jiahong; Ke, Wei

doi:10.1016/j.ijleo.2018.06.151

Cited by 9 publications

(4 citation statements)

References 11 publications

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“…In the range of 0-700 kPa, a sensitivity of 2.93 nm/MPa was obtained. A miniature fiber pressure sensor based on an in-fiber confocal cavity was proposed [101]. The fabrication process of the cavity and thin film also included fusion splicing, cleaving, and polishing.…”

Section: Blood Pressurementioning

confidence: 99%

Recent Progress of Miniature MEMS Pressure Sensors

Song

et al. 2020

Micromachines

153

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Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various merits, such as low power consumption, being lightweight, having a small volume, accurate measurement in a space-limited region, low cost, little influence on the objects being detected. Accurate blood pressure has been frequently required for medical diagnosis. Miniature pressure sensors could directly measure the blood pressure and fluctuation in blood vessels with an inner diameter from 200 to 1000 μm. Glaucoma is a group of eye diseases usually resulting from abnormal intraocular pressure. The implantable pressure sensor for real-time inspection would keep the disease from worsening; meanwhile, these small devices could alleviate the discomfort of patients. In addition to medical applications, miniature pressure sensors have also been used in the aerospace, industrial, and consumer electronics fields. To clearly illustrate the “miniature size”, this paper focuses on miniature pressure sensors with an overall size of less than 2 mm × 2 mm or a pressure sensitive diaphragm area of less than 1 mm × 1 mm. In this paper, firstly, the working principles of several types of pressure sensors are briefly introduced. Secondly, the miniaturization with the development of the semiconductor processing technology is discussed. Thirdly, the sizes, performances, manufacturing processes, structures, and materials of small pressure sensors used in the different fields are explained in detail, especially in the medical field. Fourthly, problems encountered in the miniaturization of miniature pressure sensors are analyzed and possible solutions proposed. Finally, the probable development directions of miniature pressure sensors in the future are discussed.

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Section: Blood Pressurementioning

confidence: 99%

Recent Progress of Miniature MEMS Pressure Sensors

Song

et al. 2020

Micromachines

153

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“…As a result, such resonators are actively used in science and technology, for example: in microscopy [1,2], spectroscopy [3], lasers [4], etc. [5,6].…”

Section: Introductionmentioning

confidence: 99%

Experimental study of a ring confocal resonator

Filatov,

Gorelaya,

Alhasan

et al. 2023

Advanced Sensor Systems and Applications XIII

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The condition and concept of confocality for ring resonators is considered. The results of the development of a compact (meridional cross-sectional area less than 2 cm2) monoblock ring resonator designed to operate as a sensitive element of an optical gyroscope are presented. A prototype batch of these resonators were studied experimentally. In particular, the shape of the reflecting surfaces of ring confocal resonators and their mutual orientation were measured. The problem of stable input and output of light from monoblock ring confocal resonators and the possibility of their integration into the design of an optical resonator gyroscope are also considered.

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“…They have the advantage of FP cavity length and can be designed and adjusted artificially according to requirements; in this way, the cavity length can be precisely controlled, and the cavity length can be adjusted flexibly. In 2018, [23] Wang et al proposed a miniature pressure sensor with a coaxial air cavity. The sensitivity is 193 pm/MPa within the pressure measurement range of 0-1 MPa.…”

Section: Introductionmentioning

confidence: 99%

A High Precision Fiber Optic Fabry–Perot Pressure Sensor Based on AB Epoxy Adhesive Film

Zhang

Gao

et al. 2021

Photonics

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This paper proposes a Fabry–Perot pressure sensor based on AB epoxy adhesive with ultra-high sensitivity under low pressure. Fabry–Perot interference, located between single-mode fiber (SMF) and hollow-core fiber (HCF), is an ultra-thin AB epoxy film formed by capillary action. Then the thick HCF was used to fix the HCF and SMF at both ends with AB epoxy adhesive. Experimental results show that when the thickness of AB epoxy film is 8.74 μm, and the cavity length is 30 μm, the sensor has the highest sensitivity. The sensitivity is 257.79 nm/MPa within the pressure range of 0–70 kPa. It also investigated the influence of the curing time of AB epoxy on the interference spectrum. Experiments showed that the interference spectrum peak is blue-shifted with the increase of curing time. Our study also demonstrated the humidity stability of this pressure sensor. These characteristics mean that our sensor has potential applications in the biomedical field and ocean exploration.

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Miniature fiber pressure sensor based on an in-fiber confocal cavity

Cited by 9 publications

References 11 publications

Recent Progress of Miniature MEMS Pressure Sensors

Recent Progress of Miniature MEMS Pressure Sensors

Experimental study of a ring confocal resonator

A High Precision Fiber Optic Fabry–Perot Pressure Sensor Based on AB Epoxy Adhesive Film

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