Ellipsometry - Principles and Techniques for Materials Characterization 2017
DOI: 10.5772/intechopen.70278
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Mie-Scattering Ellipsometry

Abstract: The size and refractive index of particles can be analyzed through the measurement of polarization state of scattered light. The change of polarization state in Mie scattering has been represented by ellipsometric parameters, Ψ and Δ, like the reflection ellipsometry. The analysis method is called Mie-scattering ellipsometry. By in-process Miescattering ellipsometry, the growth processes of carbon particles in argon plasma and in methane plasma were analyzed. It was found that carbon particles grow by coagulat… Show more

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Cited by 3 publications
(2 citation statements)
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“…The integral photography technique has great potential of versatile applications for plasma measurement. With the help of Mie-scattering ellipsometry technique [31,32], it would bring information about the size of particles in addition to sixdimensional information about position and velocity. Combined with intrinsic fluorescence spectroscopy [33], specification of dust's materials will be available not only for standard polymer but also for unusual target such as microorganisms [34,35].…”
Section: Expected Future Of the Integral Photography Technique For Plmentioning
confidence: 99%
“…The integral photography technique has great potential of versatile applications for plasma measurement. With the help of Mie-scattering ellipsometry technique [31,32], it would bring information about the size of particles in addition to sixdimensional information about position and velocity. Combined with intrinsic fluorescence spectroscopy [33], specification of dust's materials will be available not only for standard polymer but also for unusual target such as microorganisms [34,35].…”
Section: Expected Future Of the Integral Photography Technique For Plmentioning
confidence: 99%
“…Details about the analysis of fine particles by Mie-scattering ellipsometry are described in Refs. [30,32,33]. Figure 8 shows a (Ψ, Δ) trajectory as a result of Mie-scattering ellipsometry measurement for spherical carbon particles growing by coating in a plasma including methane (Figure 8(A)).…”
Section: Analysis By Mie-scattering Ellipsometrymentioning
confidence: 99%