Microwave MIM Capacitors Enabled by an iCVD N-type Parylene Dielectric for Flexible MMIC

Zheng, Wenhao; Wang, Yan; Lan, Yu; Xu, Yuehang

doi:10.1109/imws-amp53428.2021.9643909

Cited by 1 publication

(1 citation statement)

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“…Microwave metal–insulator–metal (MIM) capacitors were fabricated using the dielectric N‐parylene grown by iCVD. [ 69 ] The iCVD MIM capacitors were demonstrated to be mechanically stable and remain robust at tensile strains up to at least 2%. In contrast, MIM capacitors fabricated on plastic substrates with conventional SiO 2 or TiO 2 dielectrics tolerate tensile strains of < 0.2%.…”

Section: Logic and Memory Devicesmentioning

confidence: 99%

Designing Organic and Hybrid Surfaces and Devices with Initiated Chemical Vapor Deposition (iCVD)

Gleason

2023

Advanced Materials

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The initiated Chemical Vapor Deposition (iCVD) technique is an all‐dry method for designing organic and hybrid polymers. Unlike methods utilizing liquids or line‐of‐sight arrival, iCVD provides conformal surface modification over intricate geometries. Uniform, high‐purity, and pinhole‐free iCVD films can be grown with thicknesses ranging from > 15 μm to < 5 nm. The mild conditions permit damage‐free growth directly on to flexible substrates, 2D materials, and liquids. Novel iCVD polymer morphologies include nanostructured surfaces, nanoporosity, and shaped particles. The well‐established fundamentals of iCVD facilitate the systematic design and optimization of polymers and copolymers. The functional groups provide fine tuning of surface energy, surface charge, and responsive behavior. Further reactions of the functional groups in the polymers can yield either surface modification, compositional gradients through the layer thickness, or complete chemical conversion of the bulk film. The iCVD polymers have been integrated into multilayer device structures as desired for applications in sensing, electronics, optics, electrochemical energy storage, and biotechnology. For these devices, hybrids offer higher values of refractive index and dielectric constant. Multivinyl monomers typically produce ultrasmooth and pinhole‐free and mechanically deformable layers and robust interfaces which are especially promising for electronic skins and wearable optoelectronics.This article is protected by copyright. All rights reserved

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Section: Logic and Memory Devicesmentioning

confidence: 99%

Designing Organic and Hybrid Surfaces and Devices with Initiated Chemical Vapor Deposition (iCVD)

Gleason

2023

Advanced Materials

View full text Add to dashboard Cite

show abstract

Microwave MIM Capacitors Enabled by an iCVD N-type Parylene Dielectric for Flexible MMIC

Cited by 1 publication

References 15 publications

Designing Organic and Hybrid Surfaces and Devices with Initiated Chemical Vapor Deposition (iCVD)

Designing Organic and Hybrid Surfaces and Devices with Initiated Chemical Vapor Deposition (iCVD)

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