Microwave atmospheric pressure plasma jet generated from substrate integrated waveguide resonator

Abstract

A microwave atmospheric pressure plasma jet (MW-APPJ) generator based on a substrate-integrated waveguide (SIW) resonator is proposed. A thin, straight plasma needle with a length of 9 cm could be obtained. Higher than 90% of microwave feeding efficiency is obtained under a wide range of gas flow rates without a microwave matching network. As the gas flow increased from 1 to 14 L/min, a transition from