1996
DOI: 10.1007/bf00173127
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Microtribological studies of unlubricated sliding Si/Si contact in air using AFM/FFM

Abstract: Tribological properties of Si/Si contacts were measured on a microscale by using an atomic force/friction force microscope. Friction forces and pull-off forces between a Si tip and a polished surface ofa Si(100) wafer were studied as a function of applied normal load and relative humidity of the surrounding air. The results show that pull-off forces and friction coefficients increased and were strongly influenced by capillary forces with increasing humidity. Tribological interactions during 20 passes of overla… Show more

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Cited by 5 publications
(5 citation statements)
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“…92 N/m. Our measured values of absolute friction force for both FLG 41 and SiO 2 45 are in good agreement with previous reports.…”
Section: Resultssupporting
confidence: 93%
“…92 N/m. Our measured values of absolute friction force for both FLG 41 and SiO 2 45 are in good agreement with previous reports.…”
Section: Resultssupporting
confidence: 93%
“…With single asperity geometry of a tip contact with a planar sample, it is generally accepted that, in vacuum, maximal shear force [34,35] in the junction, Fms, is given by a continuum model such that…”
Section: Discussionmentioning
confidence: 99%
“…Assuming the same single asperity geometrical symmetry between a tip and planar sample, it is generally assumed that, in vacuum, maximal shear response (33,34) in the junction, F f , is given by a continuum model such that where τ is the constant interfacial shear strength (21), it should be noted, however, that the validity of this model at the nanoscale is still a subject of some debate (35,36). Furthermore, the thermal resistance of the probe-sample interface can be calculated using the method outlined by Prasher (37).…”
Section: Discussionmentioning
confidence: 99%
“…Um Kontaktund tribologische Pha Ènomene auf atomarer Skala zu charakterisieren, wurden Untersuchungen an unterschiedlich vorbehandelten Si-bzw. SiC-Proben mit dem Rasterkraftmikroskop (atomic force microscope, AFM) sowie dem Reibungskraftmikroskop (friction force microscope, FFM) durchgefu Èhrt [11,12]. Auf einer hydrophilen, mit ihrer natu Èrlichen Oxidschicht bedeckten Si-Probe [11] nahmen im Gleitkontakt mit einer Wolframspitze (Radius 100 nm) sowohl die Adha Èsionskraft als auch die Reibungszahl mit zunehmender Luftfeuchte von 70% auf 95% um etwa die Ha Èlfte ab.…”
Section: Introductionunclassified
“…Das Reibungs-und Adha Èsionsverhalten auf der hydrophilen Oberfla Èche wurde auf die Wechselwirkung mit angelagerten Wassermoleku Èlen unter Ausbildung von Kapillarmenisken sowie den schmierenden Effekt der Wasserschicht zuru Èckgefu Èhrt, wohingegen diese Effekte auf der hydrophoben Oberfla Èche wesentlich schwa Ècher ausgepra Ègt waren. Im Kontakt einer Si(111)-Oberfla Èche mit einer Si-Spitze [12] nahm die Adha Èsionskraft und die Reibungs-zahl mit zunehmender relativer Luftfeuchte deutlich zu. Dies wurde dadurch erkla Èrt, daû bei geringen Luftfeuchten der Festko Èrperkontakt und bei hohen Luftfeuchten die Kapillarmenisken ausschlaggebend waren.…”
Section: Introductionunclassified