Scanning Thermal Microscopy (SThM) uses micromachined thermal sensors integrated in a force sensing cantilever with a nanoscale tip can be highly useful for exploration of thermal management of nanoscale semiconductor devices. As well as mapping of surface and subsurface properties of related materials. Whereas SThM is capable to image externally generated heat with nanoscale resolution, its ability to map and measure thermal conductivity of materials has been mainly limited to polymers or similar materials possessing low thermal conductivity in the range from 0.1 to 1 Wm -1 K -1 , with lateral resolution on the order of 1 µm.In this paper we use linked experimental and theoretical approaches to analyse thermal performance and sensitivity of the micromachined SThM probes in order to expand their applicability to a broader range of nanostructures from polymers to semiconductors and metals. We develop physical models of interlinked thermal and electrical phenomena in these probes and their interaction with the sample on the mesoscopic length scale of few tens of nm and then validate these models using experimental measurements of the real probes, which provided the basis for analysing SThM performance in exploration of nanostructures. Our study then highlights critical features of these probes, namely, the geometrical location of the thermal sensor with respect to the probe apex, thermal conductance of the probe to the support base, heat conduction to the surrounding gas, and the thermal conductivity of tip material adjacent to the apex. It is furthermore allows us to propose a novel design of the SThM probe that incorporates a multiwall carbon nanotube (CNT) or similar high thermal conductivity graphene sheet material with longitudinal dimensions on micrometre length scale positioned near the probe apex that can provide contact areas with the sample on the order of few tens of nm. The new sensor is predicted to provide greatly improved spatial resolution to thermal properties of nanostructures, as well as to expand the sensitivity of the SThM probe to materials with heat conductivity values up to 100-1000 Wm -1 K -1 .

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We present a new concept of scanning thermal nanoprobe that utilizes the extreme thermal conductance of a carbon nanotube (CNT) to channel heat between the probe and the sample. The integration of CNT in scanning thermal microscopy (SThM) overcomes the main drawbacks of standard SThM probes, where the low thermal conductance of the apex SThM probe is the main limiting factor. The integration of CNT (CNT-SThM) extends SThM sensitivity to thermal transport measurement in higher thermal conductivity materials such as metals, semiconductors and ceramics, while also improving the spatial resolution. Investigation of thermal transport in ultra large scale integration (ULSI) interconnects, using CNT-SThM probe, showed fine details of heat transport in ceramic layer, vital for mitigating electromigration in ULSI metallic current leads. For a few layer graphene, the heat transport sensitivity and spatial resolution of the CNT-SThM probe demonstrated significantly superior thermal resolution compared to that of standard SThM probes achieving 20-30 nm topography and ~30 nm thermal spatial resolution compared to 50-100 nm for standard SThM probes. The outstanding axial thermal conductivity, high aspect ratio and robustness of CNTs can make CNT-SThM the perfect thermal probe for the measurement of nanoscale thermophysical properties and an excellent candidate for the next generation of thermal microscopes.

A technique for highly reproducible deposition of nanoscale sized gold dots in an atomic force microscopy (AFM) configuration is described. This is achieved by precisely controlling the tip–sample separation, using feedback control enabled by the application of an external electrostatic servo force. Application of a voltage pulse of either polarity to a gold coated oscillating cantilever tip leads to the deposition of the Au dot. Dimensions for the fabricated dots are 6–100 nm in width, and <1–10 nm in height. The well controlled deposition process allowed the study of dot formation and the obtaining of relevant statistics. We found that the deposition process is the field emission of Au ions. Nevertheless, threshold values obtained are higher than previously reported ones and were found to be dependent on the tip shape. Depositions are independent of substrate morphology and lithographically patterned lines formed by overlapping Au nanodots as long as 55 µm have been fabricated.

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