The growth of GaAs on ( 100)ScXErl -,As/GaAs (X =0 and 0.3) by molecular-beam epitaxy has been studied using transmission electron microscopy. The initial stages of the three-dimensional growth of GaAs on lattice-matched Sc,,,Era7As have been investigated at different growth temperatures. Besides (100) epitactic GaAs, there are also areas of (1 ll)-and {122}-oriented GaAs observed on Sc,Er,-,As. The latter has a simple twin relationship with the neighboring (100) GaAs. Areas of (1 ll}-oriented GaAs have been observed only at growth temperatures above 400 "C and with moderate growth rates. The GaAs islands grown at 480 "C are faceted on { 110) and (111) low-index planes. These GaAs islands are elongated along (011) directions. The anisotropy of the island shape is greater at higher growth temperatures. The growth of GaAs on Sc,Er,-,As as islands is considered to be due to chemical rather than strain effects. The morphology of GaAs layers grown on Sc,Er, -,As is shown to have a strong dependence on the growth conditions. 0 1995 American Institute of Physics.