Microstructure of 5 keV gold-implanted polydimethylsiloxane

Niklaus, Muhamed; Rosset, Samuel; Dadras, M.; Dubois, Philippe; Shea, Herbert

doi:10.1016/j.scriptamat.2008.06.038

Cited by 26 publications

(29 citation statements)

References 19 publications

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“…For titanium, the percolation begins for the same dose, but is much less sharp, and the surface resistance at higher doses is larger than for gold. Palladium has a percolation threshold below 1 Â 10 16 at cm À2 , which is therefore not visible on this set of samples. The percolation threshold of Pd-implanted layers occurring at low doses, combined with the high ion flux obtained with Pd on our FCVA system, makes it difficult to obtain layers in the percolation zone.…”

Section: à2mentioning

confidence: 71%

“…For Ti, Au, and Pd, different doses were used, starting at www.afm-journal.de Figure 1. Transmission electron microscopy (TEM) cross-section of Auimplanted PDMS (dose of 1.5 Â 10 16 at cm À2 at 5 keV), which shows the Au atoms forming nm-size clusters when implanted into PDMS [16]. The atoms extend from the surface down to a depth of about 60 nm below the surface.…”

Section: Resistance and Time Stabilitymentioning

confidence: 99%

“…[16] At low doses (<10 16 at cm À2 for Au) the implanted particles' density is low and they are too far apart from each other to create a conductive path. Consequently, resistance remains very high (above 200 MV).…”

Section: à2mentioning

confidence: 99%

“…The maximal strain s max was increased from 30% for an implantation dose of 800 pulses cm À2 to 175% for a dose of 400 pulses cm À2 . TEM images of membranes' cross-sections implanted at 5 keV show that the cluster size increases with the dose, [16] suggesting that a highly implanted gold layer exhibits characteristics that will tend toward those of a continuous metallic film. The dose must be controlled to obtain simultaneously very high maximum strain (>50%) and a time-stable conductivity.…”

Section: Maximum Strain Capabilitiesmentioning

confidence: 99%

See 3 more Smart Citations

Metal Ion Implantation for the Fabrication of Stretchable Electrodes on Elastomers

Rosset

Niklaus

Dubois

et al. 2009

Adv Funct Materials

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186

198

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Here, the use of low‐energy metal ion implantation by filtered cathodic vacuum arc to create highly deformable electrodes on polydimethylsiloxane (PDMS) membranes is reported. Implantation leads to the creation of nanometer‐size clusters in the first 50 nm below the surface. When the elastomer is stretched, these small clusters can move relative to one another, maintaining electrical conduction at strains of up to 175%. Sheet resistance versus ion dose, resistance versus strain, time stability of the resistance, and the impact of implantation on the elastomer's Young's modulus are investigated for gold, palladium, and titanium implantations. Of the three tested metals, gold has the best performance, combining low and stable surface resistance, very high strain capabilities before loss of electrical conduction, and low impact on the Young's modulus of the PDMS membrane. These electrodes are cyclically strained to 30% for more than 105 cycles and remain conductive. In contrast, sputtered or evaporate metals films cease to conduct at strains of order 3%. Additionally, metal ion implantation allows for creating semi‐transparent electrodes. The optical transmission through 25‐µm‐thick PDMS membranes decreases from 90% to 60% for Pd implantations at doses used to make stretchable electrodes. The implantation technique presented here allows the rapid production of reliable stretchable electrodes for a number of applications, including dielectric elastomer actuators and foldable or rollable electronics.

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Section: à2mentioning

confidence: 71%

Section: Resistance and Time Stabilitymentioning

confidence: 99%

Section: à2mentioning

confidence: 99%

Section: Maximum Strain Capabilitiesmentioning

confidence: 99%

See 2 more Smart Citations

Metal Ion Implantation for the Fabrication of Stretchable Electrodes on Elastomers

Rosset

Niklaus

Dubois

et al. 2009

Adv Funct Materials

Self Cite

186

198

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show abstract

“…The surface roughness was measured with a Digital Instruments D3100 AFM. The TEM images were obtained with TEM Philips CM, and TEM samples were prepared using a Cryo-ultra-microtome (Leica Ultracut E) at -130°C as described in detail in [2]. A bulge Test setup was used to extract the elasticity of membranes.…”

Section: Methodsmentioning

confidence: 99%

Comparison of two Metal Ion Implantation Techniques for Fabrication of Gold and Titanium Based Compliant Electrodes on Polydimethylsiloxane

et al. 2009

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This study contrasts the implantation of 25 µm thick Polydimethylsiloxane (PDMS) membranes with titanium and gold ions at 10 keV and 35 keV for doses from 1x10 15 at/cm 2 to 2.5x10 16 at/cm 2 implanted with two different techniques: Filtered Cathodic Vacuum Arc (FCVA) and Low Energy Broad Ion Beam (LEI). The influence of the ion energy, ion type, and implantation tool on the Young's modulus (E), resistivity and structural properties (nanocluster size and location, surface roughness) of PDMS membranes is reported. At a dose of 2.5x10 16 at/cm 2 and an energy of 10 keV, which for FCVA yields sheet resistance of less than 200 Ω/square, the initial value of E (0.85 MPa) increases much less for FCVA than for LEI. For gold we obtain E of 5 MPa (FCAV) compared to 86 MPa (LEI) and for titanium 0.94 MPa (FCVA) compared to 57 MPa (LEI). Resistivity measurements show better durability for LEI than for FCVA implanted samples and better time stability for gold than for titanium.

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High Breakdown Field Dielectric Elastomer Actuators Using Encapsulated Polyaniline as High Dielectric Constant Filler

Molberg

Crespy

Rupper

et al. 2010

Adv Funct Materials

266

215

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A novel method allowing rapid production of reliable composites with increased dielectric constant and high dielectric strength for dielectric elastomer actuators (DEA) is reported. The promising approach using composites of conductive particles and insulating polymers generally suffers from low breakdown fields when applied to DEA devices. The present publication shows how to overcome this deficiency by using conductive polyaniline (PANI) particles encapsulated into an insulating polymer shell prior to dispersion. PANI particles are encapsulated using miniemulsion polymerization (MP) of divinylbenzene (DVB). The encapsulation process is scaled up to approximately 20 g particles per batch. The resulting particles are used as high dielectric constant (ϵ′) fillers. Composites in a polydimethylsiloxane (PDMS) matrix are prepared and the resulting films characterized by dielectric spectroscopy and tensile tests, and evaluated in electromechanical actuators. The composite films show a more than threefold increase in ϵ′, breakdown field strengths above 50 V μm−1, and increased strain at break. These novel materials allow tuning the actuation strain or stress output and have potential as materials for energy harvesting.

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Microstructure of 5 keV gold-implanted polydimethylsiloxane

Cited by 26 publications

References 19 publications

Metal Ion Implantation for the Fabrication of Stretchable Electrodes on Elastomers

Metal Ion Implantation for the Fabrication of Stretchable Electrodes on Elastomers

Comparison of two Metal Ion Implantation Techniques for Fabrication of Gold and Titanium Based Compliant Electrodes on Polydimethylsiloxane

High Breakdown Field Dielectric Elastomer Actuators Using Encapsulated Polyaniline as High Dielectric Constant Filler

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