Here, the use of low‐energy metal ion implantation by filtered cathodic vacuum arc to create highly deformable electrodes on polydimethylsiloxane (PDMS) membranes is reported. Implantation leads to the creation of nanometer‐size clusters in the first 50 nm below the surface. When the elastomer is stretched, these small clusters can move relative to one another, maintaining electrical conduction at strains of up to 175%. Sheet resistance versus ion dose, resistance versus strain, time stability of the resistance, and the impact of implantation on the elastomer's Young's modulus are investigated for gold, palladium, and titanium implantations. Of the three tested metals, gold has the best performance, combining low and stable surface resistance, very high strain capabilities before loss of electrical conduction, and low impact on the Young's modulus of the PDMS membrane. These electrodes are cyclically strained to 30% for more than 105 cycles and remain conductive. In contrast, sputtered or evaporate metals films cease to conduct at strains of order 3%. Additionally, metal ion implantation allows for creating semi‐transparent electrodes. The optical transmission through 25‐µm‐thick PDMS membranes decreases from 90% to 60% for Pd implantations at doses used to make stretchable electrodes. The implantation technique presented here allows the rapid production of reliable stretchable electrodes for a number of applications, including dielectric elastomer actuators and foldable or rollable electronics.

Abstract-In this paper, we present miniaturized polydimethylsiloxane (PDMS)-based diaphragm dielectric elastomer actuators capable of out-of-plane displacement up to 25% of their diameter. This very large percentage displacement is made possible by the use of compliant electrodes fabricated by low-energy gold ion implantation. This technique forms nanometer-scale metallic clusters up to 50 nm below the PDMS surface, creating an electrode that can sustain up to 175% strain while remaining conductive yet having only a minimal impact on the elastomer's mechanical properties. We present a vastly improved chip-scale process flow for fabricating suspended-membrane actuators with low-resistance contacts to implanted electrodes on both sides of the membrane. This process leads to a factor of two increase in breakdown voltage and to RC time constant shorter than mechanical time constants. For circular diaphragm actuator of 1.5-3-mm diameter, voltage-controlled static out-of-plane deflections of up to 25% of their diameter is observed, which is a factor of four higher than our previous published results. Dynamic characterization shows a mechanically limited behavior, with a resonance frequency near 1 kHz and a quality factor of 7.5 in air. Lifetime tests have shown no degradation after more than 4 million cycles at 1.5 kV. Conductive stretchable electrodes photolithographically defined on PDMS were demonstrated as a key step to further miniaturization, enabling large arrays of independent diaphragm actuators on a chip, for instance for tunable microlens arrays or arrays of micropumps and microvalves.[ 2009-0107]Index Terms-Dielectric elastomer actuators (DEAs), electroactive polymers (EAPs), filtered cathodic vacuum arc (FCVA), metal ion implantation.

The mechanical and electrical properties of nanocomposites created by gold and titanium implantation into polydimethysiloxane (PDMS) are reported for doses from 10 15 to 5 Â 10 16 at. cm À2, and for ion energies of 2.5, 5 and 10 keV. Transmission electron microscopy (TEM) cross-section micrographs allowed detailed microstructural analysis of the implanted layers. Gold ions penetrate up to 30 nm and form crystalline nanoparticles whose size increases with ion dose and energy. Titanium forms a nearly homogeneous amorphous composite with the PDMS up to 18 nm thick. Using TEM micrographs, the metal volume fraction of the composite was accurately determined, allowing both electrical conductivity and Young's modulus to be plotted vs. the volume fraction, enabling quantitative use of percolation theory for nanocomposites <30 nm thick. This allows the composite's Young's modulus and conductivity to be linked directly to the implantation parameters and volume fraction. Electrical and mechanical properties were measured on the same nanocomposite samples, and different percolation thresholds and exponents were found, showing that, while percolation explains both conduction and stiffness of the composite very well, the interaction between metal nanoparticles occurs differently in determining mechanical and electrical properties.

We report on the characterization, active tuning, and modeling of the first mode resonance frequency of dielectric electroactive polymer (DEAP) membranes. Unlike other resonance frequency tuning techniques, the tuning procedure presented here requires no external actuators or variable elements. Compliant electrodes were sputtered or implanted on both sides of 20-35-µm-thick and 2-4-mm-diameter polydimethylsiloxane membranes. The electrostatic force from an applied voltage adds compressive stress to the membrane, effectively softening the device and reducing its resonance frequency, in principle to zero at the buckling threshold. A reduction in resonance frequency up to 77% (limited by dielectric breakdown) from the initial value of 1620 Hz was observed at 1800 V for ion-implanted membranes. Excellent agreement was found between our measurements and an analytical model we developed based on the Rayleigh-Ritz theory. This model is more accurate in the tensile domain than the existing model for thick plates applied to DEAPs. By varying the resonance frequency of the membranes (and, hence, their compliance), they can be used as frequency-tunable attenuators. The same technology could also allow the fine-tuning of the resonance frequencies in the megahertz range of devices made from much stiffer polymers.

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