Microstructure and tribological properties of TiSiCN composite coatings with different carbon contents deposited by plasma‐enhanced magnetron sputtering
Abstract:TiSiCN composite coatings with different C contents were prepared on Cr buffer layer by plasma‐enhanced magnetron sputtering. The structure, composition, surface, and cross‐sectional morphology of the coatings were characterized by X‐ray photoelectron spectroscopy, X‐ray diffraction, Raman spectroscopy, scanning electron microscope, and atomic force microscope. The hardness, elastic modulus, and tribological performance of the coatings were evaluated by nanoindentation and reciprocating friction tests. The res… Show more
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