2015
DOI: 10.1007/s10854-015-3170-5
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Microstructure and optical properties of cobalt–carbon nanocomposites prepared by RF-sputtering

Abstract: Cobalt/carbon nanocomposite coating (Co NPs @ a-C: H), which consist of cobalt nanoparticles buried in hydrogenated amorphous carbon are prepared by RFsputtering and RF-plasma enhanced chemical vapor deposition on silicon substrates. In these processes, the coatings are produced from a cobalt sputtered target and acetylene reactant gas. The crystalline structure and surface topography of the deposited films are characterized by X-ray diffraction (XRD) and atomic force microscopy (AFM), respectively. The AFM sh… Show more

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Cited by 24 publications
(10 citation statements)
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“…Arrays of nickel nanoparticles (Ni NPs) on carbon substrates with different Ni NPs concentrations were grown using simultaneously RF-sputtering with a Ni target and RF-PECVD following a procedure similar to that described elsewhere [15][16][17][18][19][20]. The used experimental arrangement consisted of a steel sample chamber connected to two rotary and diffusion pumps, and two electrodes of different area size; the smallest electrode was a nickel target electrode with a diameter of 7.5 cm and powered by a RF power supply.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Arrays of nickel nanoparticles (Ni NPs) on carbon substrates with different Ni NPs concentrations were grown using simultaneously RF-sputtering with a Ni target and RF-PECVD following a procedure similar to that described elsewhere [15][16][17][18][19][20]. The used experimental arrangement consisted of a steel sample chamber connected to two rotary and diffusion pumps, and two electrodes of different area size; the smallest electrode was a nickel target electrode with a diameter of 7.5 cm and powered by a RF power supply.…”
Section: Methodsmentioning
confidence: 99%
“…In this matter, the sputtering [12,13] and the chemical vapor deposition techniques [14] have been especially relevant, and their versatility have recently combined to prepare nanocomposite films [15][16][17][18][19][20].…”
Section: Introductionmentioning
confidence: 99%
“…Due to a layer of its oxide acting as a protection, it is corrosion-resistant, so its thin layers are used to cover other metals to prevent corrosion, which has many uses for the production of industrial tools [1][2][3].…”
Section: Introductionmentioning
confidence: 99%
“…In this regards, in modern manufacturing processes, two approaches are mainly used for the analysis of 3-D surface topography: statistical and fractal methods [1,5,[9][10][11][12][13][14][15][16]. Given the complex surface topography of nano-and microstructures, it cannot be completely characterized only by using the traditional Euclidean geometry; therefore, the use of fractal geometry is more convenient for surface roughness analyses of such systems [1,5,[9][10][11][12][13][14][15][16].…”
Section: Introductionmentioning
confidence: 99%