2004
DOI: 10.1063/1.1808904
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Microstructure and electrical properties of sputter-deposited Zn0.87Fe2.13O4 thin layers

Abstract: Sputtering deposition of spinel ferrites leads to a combination of attractive physical properties (optical, magnetic, and semiconducting), which can be adjusted by carefully selecting the preparation conditions and stoichiometry during controlled postdeposition annealing. Thin-sputtered ferrite films are of great interest for integration as functional parts in microsystems. In this paper, we report the effect on electrical properties of the microstructure of sputtered zinc-ferrite films. Transmission electron … Show more

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Cited by 25 publications
(18 citation statements)
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“…This lower value of the magnetization in the case of thin film cobaltite cannot be explained by the presence of porosity. Indeed, it was shown that ferrite thin films deposited by RF sputtering from a ceramic target, at 0.5 Pa, are dense due to low shadowing effects during the film growth [42,43]. Most of the articles related to magnetic properties of oxide thin films obtained by sputtering further show that the samples obtained have much lower saturation magnetization than those measured on bulk materials [29,44,45].…”
Section: Magnetic Propertiesmentioning
confidence: 93%
See 1 more Smart Citation
“…This lower value of the magnetization in the case of thin film cobaltite cannot be explained by the presence of porosity. Indeed, it was shown that ferrite thin films deposited by RF sputtering from a ceramic target, at 0.5 Pa, are dense due to low shadowing effects during the film growth [42,43]. Most of the articles related to magnetic properties of oxide thin films obtained by sputtering further show that the samples obtained have much lower saturation magnetization than those measured on bulk materials [29,44,45].…”
Section: Magnetic Propertiesmentioning
confidence: 93%
“…In addition, the increase of thin films inter-granular porosity versus deposition pressure can also contribute to the increase in resistivity versus argon pressure. Indeed, F. Oudrhiri-Hassani et al [42] and S. Capdeville et al [43] have shown a strong increase of the inter-granular porosity for the highest deposition pressures. The surface enhancement factor (surface area divided by projected area) was about 20 to 55 times higher for the films deposited at 2.0 Pa than for those made at 0.5 Pa. Electrical measurements revealed a strong dependence of the resistivity versus the inter-grain porosity.…”
Section: Electrical Propertiesmentioning
confidence: 97%
“…During sputtering of an oxide target, the layer grown on the substrate is submitted to continuous bombardment with high energy species from plasma and target, which can induce specific characteristics or properties [1][2][3]. In this study, we tuned bias sputtering conditions to obtain nanocomposite iron oxide from a magnetite target.…”
Section: Introductionmentioning
confidence: 99%
“…However the control of this chemical reaction is quite difficult. A convenient method to obtain substituted-ferrite thin films is by radio frequency (RF) sputtering of a mixed ferrite target [4][5][6]. Physical and chemical properties of as-such grown films are highly dependent on the sputtering conditions (argon pressure, RF power, target/substrate distance, magnetron…).…”
Section: Introductionmentioning
confidence: 99%